Tokyo Electron Limited

Tokyo Electron Yamanashi Limited

Masahide Watanabe

Mitsuaki Komino

Kenji Ishikawa

Shiro Koyama

Kouichi Kazama

Masami Kubota

Takanori Sakurai

An electrostatic chuck of this invention includes a conductive film, an insulating coat formed on a susceptor to cover the conductive film, and a feeder circuit for applying a voltage to the conductive film to cause the insulating coat to generate an electrostatic attractive force. The feeder circuit includes a connecting conductor replacing a portion of the insulating coat to be electrically connected to the conductive film, a first feeder pin extending through the susceptor from its front surface side to its rear surface side and having one end portion electrically connected to the connecting conductor, an insulating member for insulating the first feeder pin from the susceptor, a second feeder pin having one end portion pressed against the other end portion of the first feeder pin to be electrically connected to the first feeder pin, and a power supply electrically connected to the second feeder pin.

Electrostatic chuck

Ashing or etching is performed in a plasma surface-process apparatus and, e.g., a CO concentration of a discharge gas from the apparatus is monitored by a CO monitor. Since the generated CO concentration is correlated to a surface processing speed, an end point of surface processing can be detected by obtaining a CO concentration at the end point of surface processing in advance. When the state of the apparatus negatively changes, the plasma discharge state is changed, and, e.g., the generated CO concentration is also changed. The state of the apparatus can be obtained by monitoring the CO concentration. The plasma surface-process apparatus prevents the plasma from flowing into an inner chamber of a reaction chamber and allows only radicals generated by plasma discharge to flow into it, so that plasma processing can be effectively performed.

Plasma-process system with batch scheme

Growing community of inventors

Yamanashi-ken, Japan

Masahide Watanabe