Dainippon Screen Mfg. Co., Ltd.

Dainippon Screen Manufacturing Co., Ltd.

Screen Holdings Co., Ltd.

Osaka University

Masahide Okazaki

Toshiaki Suhara

Takahisa Hayashi

Eiichi Tamaki

Shigeaki Shimazu

Kenji Ueyama

Kenji Endo

Yasuyuki Wada

Takeshi Kageyama

Yoshio Kurata

Takashi Sakamoto

Zenji Wakimoto

Kazutaka Tasaka

Masafumi Kawatani

Hideki Morikawa

Junichi Masuo

Norizo Takao

A first electro-optic crystal substrate and a second electro-optic crystal substrate are provided as an electro-optic crystal substrate. The first electro-optic crystal substrate comprises a first periodic polarization reversal structure in which first polarization pairs, in each of which the directions of polarization in response to electric fields are opposite to each other, are arranged in a first period along a first arrangement direction which is orthogonal or inclined with respect to the direction of propagation, and light passes through the first periodic polarization reversal structure. The second electro-optic crystal substrate comprises a second periodic polarization reversal structure in which second polarization pairs, in each of which the directions of polarization in response to electric fields are opposite to each other, are arranged in a second period along a second arrangement direction which is orthogonal or inclined with respect to the direction of propagation, and light outstanding from the first electro-optic crystal substrate passes through the second periodic polarization reversal structure. At least one of a first condition and a second condition is satisfied. The first condition is that the first and the second periods are different from each other and a second condition is that the first arrangement direction and the second arrangement direction are different from each other.

Light modulator and exposure head

The ferroelectric substrateof ferroelectric crystals, while being supported by the support platewhich is thicker than the ferroelectric substrate, is integrated with the support plateby letting the junctionmediate between one major surface SA of the ferroelectric substrateand one major surface SB of the support plate, and therefore, it is possible through the flat surface polishing to perform thinning of the ferroelectric substrate, namely, the ferroelectric crystals, and as a result, it is possible to obtain the thin periodically poled structure. By the voltage application method, the domain inverted region is formed in the ferroelectric substratewhich is made thin.

Optical device, a method of manufacturing optical device, and exposure apparatus

As a spatial light modulatoris disposed between a wavelength conversion partand an exit surfacein a ferroelectric crystal substrate, only zeroth-order light which is at a particular wavelength is guided to a substrate while laser light from the wavelength conversion partis being modulated, whereby a pattern corresponding to LSI data is drawn. Further, the spatial light modulatoris disposed together with the wavelength conversion partsandinside the ferroelectric crystal substrate

Optical device, exposure apparatus and laser apparatus

In an optical modulator, a first electrode portion having a plurality of first electrodes is provided on the upper surface of a base part having a periodically-poled structure and a second electrode portion is provided on the lower surface thereof, and voltage is applied in one direction between the first electrode portion and the second electrode portion, to thereby cause a periodic change of the refractive index in a polarization-part array direction in the periodically-poled structure and diffract light which enters the base part. This allows reduction in the voltage applied between the first electrode portion and the second electrode portion, and it is thereby possible to form a desired electric field inside the periodically-poled structure while achieving a high-density channel arrangement. By reducing the voltage, the rate of the optical modulation performed by the optical modulator can be increased.

Optical modulator

An optical unit array comprises a plurality of optical units () in each of which a plurality of light source modules () are arranged and a first comb-teeth member () and a second comb-teeth member () which are provided for holding the optical units (), and respective first pins () and second pins () of a plurality of optical units () are held by the first comb-teeth member () and the second comb-teeth member (). In the optical unit array (), positions of a plurality of optical units () relative to one another can be determined with high accuracy by bringing the first pins () and the second pins () into contact with grooves () and grooves (), respectively. The outgoing positions and directions of light beams emitted from the light source modules () are also determined with high accuracy in each optical unit ().

Light source module, optical unit array and pattern writing apparatus

A semiconductor laser () is fixed onto a base part () with a submount () and a reference optical axis () is determined by the semiconductor laser (). A groove () having a U-shaped section is formed on a bonding part (), and solder () is applied in the groove () and melted and a collimator lens () supported by a supporting arm () is moved to the groove (). A light beam emitted from the semiconductor laser () is guided through the collimator lens () to an image pickup part (), where an image representing the state of the light beam is acquired. The collimator lens () is positioned with respect to the reference optical axis () on the basis of the image and fixed onto the base part () out of contact therewith, with the solder interposed therebetween. This simplifies a structure of an optical element module () in which the collimator lens () is positioned with respect to the reference optical axis () with high accuracy.

Optical element module, and apparatus and method for fixing optical element

A light source unit is provided with light source parts, a fixable member and a positioning member. Each light source part comprises a submount receiving a bare chip of a laser diode thereon and a collimator lens collimating laser beam emitted from the bare chip of the laser diode for defining the emitting direction. The plurality of light source parts are directly fixed to the fixable member consisting of a member having excellent thermal conductivity for quickly transmitting generated heat to a cooling unit and radiating the same and having a wiring function for supplying current to the light source parts. The positioning member has lens holes on prescribed positions so that the collimator lenses of the light source parts are fit therein for positioning the light source parts. Thus, a light source unit, having a plurality of channels, improving the degree of integration and precision of laser diodes and an image recorder employing the same can be provided.

Image recorder and light source unit with fixed element

An apparatus which can correctly measure and observe optical information obtained from an object by removing a boundary diffraction wave generated from an edge of a pupil of an image pickup lens or an objective lens is provided. An image pickup lens forms a spatial image of an object on a position provided with a microlens array. A plurality of microlenses are arranged in this microlens array, for pixel-separating the spatial image. Light components from the microlenses pass through corresponding microapertures respectively, to be incident upon corresponding photoreceptors respectively for forming images. The microlenses project images of a diaphragm (pupil) of the image pickup lens on the corresponding microapertures respectively. The diameters of the respective microapertures are set to be smaller than the images of the diaphragm of the image pickup lens, so that a boundary diffraction wave which is generated from an edge of the diaphragm of the image pickup lens is blocked by a microaperture array plate and prevented from propagation to the photoreceptors.

Image pickup apparatus, density measuring optical system and scanning

The present invention allows image recording with plural light beams while eliminating alignment changes of light spots on the inner face of a drum. A light beam output unit 212 combines two circularly polarized light beams having opposite handedness to each other to produce a composite light beam CB. A polarization beam splitter 203 and mirrors 205 and 207 change the course of the light beam towards the inner face of a drum 120. A quarter-wave plate 202 and the polarization beam splitter 203 splits the composite light beam to two separate light beams as a function of the handedness of the circularly polarized light. The optical elements 202, 203, 205, and 207 are integrally rotated around the axis of the drum 120 by a main scanning motor 230, thus scanning a photosensitive material 110 held on the inner face of the drum 120 with the light beams.

Apparatus for scanning drum inner face and method of scanning therefor

The present invention allows image recording with plural light beams while eliminating alignment changes of light spots on the inner face of a drum. A light beam output unit 212 combines two circularly polarized light beams having opposite handedness to each other to produce a composite light beam CB. A polarization beam splitter 203 and mirrors 205 and 207 change the course of the light beam towards the inner face of a drum 120. A quarter-wave plate 202 is included, and the polarization beam splitter 203 splits the composite light beam to two separate light beams as a function of the handedness of the circularly polarized light. The optical elements 202, 203, 205, and 207 are integrally rotated around the axis of the drum 120 by a main scanning motor 230, thus scanning a photosensitive material 110 held on the inner face of the drum 120 with the light beams.

A drum scanning type image reading apparatus includes an illumination optical system and an imaging optical system. The illumination optical system is an optical system for irradiating light upon an original. A variable aperture stop is disposed at a conjugate position with the original. In the imaging optical system, a pick-up lens focuses an image of an image reading region of the original on an image focusing surface, and photomultiplier tubes read light passing through one of holes which are formed in a main aperture plate which is disposed on the image focusing surface. To change an image reading resolution in the image reading apparatus, the image reading region and an illumination region are changed by changing the aperture size of the main aperture plate and the size of the variable aperture stop.

Image reading apparatus

Scanning drum inner face and method of scanning therefor

An afocal optical system is formed by a paraboroid mirror and an optical element having a stereographic projection characteristics which is defined by the following equation:

Growing community of inventors

Kyoto, Japan

Masahide Okazaki