Hitachi Automotive Systems, Ltd.

Hitachi, Ltd.

Hitachi Car Engineering Co., Ltd.

Other

Hitachi Automotive Engineering Co., Ltd.

Masahide Hayashi

Heewon Jeong

Daisuke Maeda

Kiyoko Yamanaka

Toshiaki Nakamura

Akira Koide

Kengo Suzuki

Hiromichi Ebine

Katsuhiko Kikuchi

Satoshi Shimada

Masatoshi Kanamaru

Takanori Aono

Kazunori Ohta

Masahiro Matsumoto

Kazuo Ono

Yoshihiro Yokota

Masashi Yura

Akihiro Okamoto

Makoto Yamamoto

Takafumi Miyatake

Akio Nagasaka

Kazuo Sato

Naoto Miura

Takeshi Harada

Yasushi Goto

Atsushi Miyazaki

Seiko Suzuki

Norio Ichikawa

Hidehito Obayashi

Takafumi Matsumura

Harumi Kiyomizu

Yasuo Osone

Teruhisa Akashi

Yuhua Zhang

Munenori Degawa

Akihiro Yaguchi

Ichiroh Ohsaka

Masaru Yamashita

Yasutaka Tsuru

Jeong Heewon

To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.

Physical quantity sensor

In an inertial sensor that includes an angular rate detection circuit having a structure synchronized with a resonant frequency of an angular rate detection element, an object thereof is to realize an angle output having high accuracy with less integration error in an integration circuit for detecting an angle. The inertial sensor includes an angular rate detection element chip Cthat has a mechanical structure for angular rate detection; and a signal processing LSI chip Cthat is angular rate detection circuit for detecting an angular rate from the angular rate detection element chip C. The signal processing LSI chip Ccalculates an angle by sampling a signal obtained from the angular rate detection element chip Cat a discrete time synchronized with a drive frequency of the angular rate detection element chip C

Inertial sensor

The present invention addresses the problem of providing an inertial force detection device with which it is possible to diagnose sensor output without hindrance even when a vehicle is traveling. In order to solve this problem, there is provided an inertial force detection device for measuring inertial force according to a displacement amount of an oscillating body, wherein a diagnosis voltage that is synchronous with an output command signal inputted from the outside is applied. Furthermore, the period over which the diagnosis voltage is applied is shorter, by a prescribed period, than a cycle of the output command signal. Furthermore, at least one of the period over which the diagnosis voltage is applied, the diagnosis voltage, a diagnosis threshold value, and a filter characteristic is varied according to the cycle of the output command signal.

Inertial force detection device

An inertial sensor having a simple configuration by vacuum sealing a resonator which detects acceleration and exploits a resonance vibration using a high Q value MEMS device. The sensor includes: a detecting proof mass and beam which detects acceleration; a driving electrode which excites the detecting proof mass and beam; a resonant frequency tuning electrode which changes the resonant frequency of the detecting proof mass and beam; and a detecting circuit which applies voltage to the resonant frequency tuning electrode for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam when the acceleration is applied to the detecting proof mass and beam during the vibration of the detecting proof mass and beam by the voltage applied to the detecting proof mass and beam, and outputs the acceleration based on a value of the voltage applied to resonant frequency tuning electrode.

Provided is a highly reliable acceleration sensor having little 0-point drift. For example, an acceleration sensor having a support substrate having a first direction and a second direction orthogonal thereto in a single surface, a device layer disposed on the support substrate with a space interposed therebetween and having a weight that deforms according to the application of acceleration, and a cap layer disposed on the device layer with a space interposed therebetween, wherein a fixed part fixed to the support substrate is provided in the center of the weight, a beam is provided that extends from the fixed part and makes the weight mobile by being connected thereto, a plurality of posts for coupling the support substrate and the cap layer are disposed on the fixed part, and electric signals are applied to and received from the weight via the posts.

Acceleration detection device

Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.

Acceleration sensor

A movable part rotates about a rotation axis, which passes through a support, when an inertial force in a detecting direction is applied to an inertial sensor. The movable part includes a first region and a second region displaced in a direction opposite to a direction of the first region when the inertial force is applied. A second substrate includes first and second detection electrodes opposed to the first and second regions, respectively. The first detection electrode and the second detection electrode are provided symmetrically with respect to the rotation axis. A cavity is provided symmetrically with respect to the rotation axis. In a direction perpendicular to the detecting direction and a direction in which the rotation axis extends, a length from the rotation axis to an end of the first region and a length from the rotation axis to an end of the second region are different.

To provide a high-reliable transfer mold type sensor device in which a combined sensor including a plurality of sensors having a function of detecting physical amounts, a substrate processing a signal from the combined sensor and controlling a signal input/output with an external device, a chip pad mounted with the combined sensor and the substrate, and a lead frame are sealed with a mold resin and a package is formed, the combined sensor is configured to be thicker than the substrate and the chip pad, a principal surface side of the combined sensor is covered with the mold resin and a back surface side thereof contacts the substrate by a joint material, and the combined sensor is arranged on a package neutral surface in a cross-section of a thickness direction of the package including the combined sensor, the substrate, and the chip pad.

Transfer mold type sensor device

The purpose of the present invention is to provide an inertial force detection device that can more accurately detect faults in a temperature sensor. Provided is an inertial force detection device configured so that in a state where an oscillating body is made to oscillate in a first direction, the amount of displacement when the oscillating body is displaced in a second direction due to the generation of angular velocity is detected as angular velocity, wherein the inertial force detection device has a means for performing control so that the oscillating body enters a state of resonance in the first direction, a temperature detection means for detecting temperature, and a means for detecting faults in the temperature detection means, and outputs a plurality of signals, which indicate the fault detection results of the three means, continuously from a single signal wire.

Angular speed detection device

For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

A compound sensor capable of suppressing a fault which has occurred in a detection element from affecting other detection units in which no fault has occurred is provided. The compound sensor includes: a plurality of detection units including C/V conversion circuitsand, amplifier circuitsand, ADCsand, diagnosis voltage outputting DACsand, carrier signal generating DACsandand substrate voltage generating DACsandwhich are signal detection circuits provided for each of a plurality of detection elements; a power source voltage input unitand a GND voltage input unitshared among each of the plurality of detection units; and overcurrent switch circuitsandwhich are fault detection circuits for detecting a fault of each detection element and stopping power supply to the detection unit in which the fault has occurred.

Compound sensor including a plurality of detection elements and a plurality of fault detection circuits

An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG., an extending portion EXU is provided so as to connect to a fixing portion FU, this extending portion EXU and a third region Pwhich configures part of a mass body MS are connected via a support beam BMand a support beam BM, and the support beam BMand the support beam BMare disposed oppositely with respect to a virtual line IL. With this, natural frequency of an unwanted mode due to rotation and torsion of the mass body MS can be shifted to a high frequency band.

Provided is a sensor signal output apparatus that outputs a sensor signal at times of the sensor being in steady operation and outputs the operational status of the sensor instead of the sensor signal when the sensor is at fault or in non-steady operation in order to thereby to have a receiver machine obtain a correct sensor signal. The sensor signal output apparatus includes a sensor detecting a physical quantity, a diagnosis part diagnosing the operating state of the sensor, and a communication part transmitting the result of detection by the sensor and the result of diagnosis by the diagnosis part. When the sensor is determined to be normally operating, the communication part selectively outputs the result of detection by the sensor. When the sensor is not determined to be normally operating, the communication part selectively outputs a signal indicative of the operating state of the sensor.

Physical quantity detection apparatus

To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substratehaving a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passageprovided in the sensor part.

Structure of physical sensor

Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency.

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Mito, Japan

Masahide Hayashi