Fujikin Inc.

Other

Masaharu Taguchi

Nobukazu Ikeda

Akihiro Morimoto

Yukio Minami

Keiji Hirao

Osamu Nakamura

Kouji Kawada

Katunori Komehana

Teruo Honiden

Touru Hirai

Toshirou Nariai

Tadahiro Ohmi

Koji Kawada

Toshiro Nariai

The method for parallel operation of moisture generating reactors according to the present invention operates so that an orifice, provided with an orifice hole having a predetermined opening diameter, is disposed on a mixed-gas inlet side of each of a plurality of moisture generating reactors connected in parallel with each other, and mixed gas G consisting of hydrogen and oxygen is supplied from a mixer to each of the moisture generating reactors through each orifice, and the flows of moisture generated by the moisture generating reactors are combined, and the resulting combined moisture is supplied to an apparatus that uses high-purity water. Thus, a need to increase the amount of high-purity water supply is met by allowing a plurality of moisture generating reactors to perform a parallel water generating operation by branching off a mixed gas consisting of Hand Oby using a simple orifice construction.

Method for parallel operation of reactors that generate moisture

A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

Apparatus and reactor for generating and feeding high purity moisture

Growing community of inventors

Osaka, Japan

Masaharu Taguchi