Fukuda Co., Ltd.

Masaharu Sugihara

Tsutomu Hara

Mao Hirata

Naoto Izumo

A method for leak testing includes a leak testing step and a reference leak step. In the leak testing step, a hollow workas a test object is encapsulated in a work capsule. A test pressure is supplied to the work capsulethrough a pathconnected to the work capsule. A variation of pressure inside the work capsuleis detected in a condition in which the pathis shut-off, and a judgment is made whether a leakage through the work is generated based on the detected output. In the reference leak step, a reference leak devicehaving a known pinholeis mounted on a work′ for reference leakage that is same as the workas the test object. The work′ for reference leakage is encapsulated in the work capsule. The test pressure is supplied to the work capsulevia the path, and a reference leakage is generated in the work′ for reference leakage via the reference leak devicein a condition in which the pathis shut-off. A variation of pressure inside the work capsuleaccompanying the reference leakage is detected.

Method for leak testing and reference leak device for leak testing

A method for leak testing includes a leak testing step and a reference leak step. In the leak testing step, a hollow workas a test object is encapsulated in a work capsule. A test pressure is supplied to the work capsulethrough a pathconnected to the work capsule. A variation of pressure inside the work capsuleis detected in a condition in which the pathis shut-off, and a judgment is made whether a leakage through the work is generated based on the detected output. In the reference leak step, a reference leak devicehaving a known pinholeis mounted on a work' for reference leakage that is same as the workas the test object. The work&#x2032; for reference leakage is encapsulated in the work capsule. The test pressure is supplied to the work capsulevia the path, and a reference leakage is generated in the work&#x2032; for reference leakage via the reference leak devicein a condition in which the pathis shut-off. A variation of pressure inside the work capsuleaccompanying the reference leakage is detected.

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Tokyo, Japan

Masaharu Sugihara