Toshiba Kikai Kabushiki Kaisha

Kabushiki Kaisha Toshiba

Fuji Jukogyo Kabushiki Kaisha

Toshiba Machine Co., Ltd.

Masafumi Tsunada

Shoichi Shin

Yasuhiko Nagakura

Hideyuki Yamada

Toshio Oishi

Tomohiro Inoue

Mitsunori Kokubo

Takao Manabe

Masahiro Ishida

Yuhei Yamakawa

Yukio Nakajima

Kiyoshi Kondo

Mitsuo Nagashima

Yasukazu Mase

Soichi Shin

There is provided a grinding apparatus which assures that a polishing cloth is automatically exchanged with a new one for a short time while suppressing the generation of abrasive grain and cut chips. The grinding apparatus includes a lower turn table rotatably supported about a vertical shaft, an upper turn table detachably disposed on the lower disc and having an abrasive cloth adhesively attached to the surface thereof, a first turn table holder for holding an unused upper turn table having a new abrasive cloth preliminary adhesively attached thereto, a second turn table holder for holding used upper turn table disconnected from the lower turn table, a turn table exchanging device including chucking means capable of seizing the turn table, serving to convey the turn table to the second turn table holder, and moreover, to take the an upper turn table from first turn table holder and place it on the lower turn table, and position determining and stopping means for stopping the turn table at the rotational angular position where the chucking means of the turn table exchanging device is engageable.

Grinding apparatus

Provided is a polishing apparatus which comprises a polishing mechanism for polishing a wafer taken out from a cassette, an attaching-detaching device for attaching to and detaching the wafer from the polishing mechanism, a device for cleaning the polished wafer, and a transportation device for transporting the wafer between the cassette, polishing mechanism, attaching-detaching device, and cleaning device. These devices are arranged individually in compartments. A working chamber is divided into a plurality of compartments by means of partitioning devices. A device for polishing a workpiece is set in one of the compartments. The apparatus is also provided with communication devices for internally connecting the adjacent compartments which are divided by the partitioning devices. The apparatus may further comprise devices for individually controlling the respective internal pressures of the compartments or a device for generating an air flow in the form of a laminar flow in each of the compartments.

Polishing apparatus

A polishing device includes a rotatable first column vertically provided at the lateral side of a surface table. A second column engages the first column so as to be able to be moved up and down by a lifting drive (air cylinder). The second column is provided with an arm, to which a polishing head is fitted. The surface table, first column and polishing head are driven by directly connected or built-in motors M1, M2 and M3.

Polishing device

The present invention uses a surface plate 8 made of carbon fiber reinforced plastics which is installed on a turntable 4, and an emery cloth 6 is adhered on the surface of the surface plate 8. This surface plate 8 is detachably installed on the turntable 4 by means of key blocks 22 or screws 26. If the turntable 4 is made of carbon fiber reinforced plastics, the entire weight of a polishing machine can be reduced.

Polishing machine with detachable surface plate

A prepreg tape is firstly prepared by bonding prepreg layer to a backing paper and then the prepreg tape is cut to a depth enough to cut the prepreg tape but not the backing paper. A unnecessary portion of the prepreg tape is removed from the backing paper to obtain a cut prepreg tape. A laminating attachment is moved in a predetermined direction while urging the prepreg tape against the surface of an operating table. The cut prepreg tape is peeled off from the backing paper and the peeled off prepreg tape is bonded to the operating table. The cut prepreg tapes are successively oriented in a predetermined direction and juxtaposed to form a laminated sheet. When the sheet is mounted on a mold of a predetermined shape. When the impregnated thermosetting resin is perfectly cured under heat and pressure a product useful for assembling various vehicles can be obtained.

Apparatus for manufacturing laminated prepreg members

A prepreg tape is firstly prepared by bonding prepreg layer to a backing paper and then the prepreg tape is cut to a depth enough to cut the prepreg tape but not the backing paper. An unnecessary portion of the prepreg tape is removed from the backing paper to obtain a cut prepreg tape. A laminating attachment is moved in a predetermined direction while urging the prepreg tape against the surface of an operating table. The cut prepreg tape is peeled off from the backing paper and the peeled off prepreg tape is bonded to the operating table. The cut prepreg tapes are successively oriented in a predetermined direction and juxtaposed to form a laminated sheet. The sheet is that mounted on a mold of a predetermined shape. When the impregnated thermosetting resin is perfectly cured under heat and pressure, a product useful for assembling various vehicles can be obtained.

Method for manufacturing laminated prepreg members

In a method and apparatus for laminating prepreg sheets, a plurality of heaters and a plurality of fans are installed beneath an operating table and a table temperature sensor and a room temperature sensor are provided in and above the operating table respectively. The heaters, fans, table temperature sensor and the room temperature sensor are controlled by a temperature control device. A face sheet is mounted on the operating table and the prepreg sheets are laminated while maintaining the temperature of the face sheet at a higher value than the temperature of the prepreg sheets, whereby the adhesive force of the face sheet becomes higher than that of a carrier sheet so that the prepreg sheet can be accurately bonded to the face sheet.

Growing community of inventors

Numazu, Japan

Masafumi Tsunada