Fujitsu Corporation

Fujitsu Media Devices Limited

Other

Masaaki Ono

Hiroshi Ishikawa

Masanori Yachi

Noboru Wakatsuki

Sumio Yamada

Yoshiro Fujiwara

Toshio Hanazawa

Hiroshi Tokunaga

Yoshio Satoh

Tsutomu Miyashita

Kazutugu Kikuchi

Motoi Yamauchi

Masanobu Yanagisawa

Hiroshi Tanaka

Yuji Kojima

Shigeo Tanji

Takashi Miyagawa

Kenji Nagata

Kenji Fukayama

Noboru Wakatuki

Katsuhiro Sawada

Takayuki Fujii

Kuninori Kawaura

The present invention provides the stress detection method for force sensor device with multiple axis sensor device and force sensor device employing this method, whose installation angle is arbitrary. The stress detection method includes, first and second force sensors whose detection axes are orthogonal to each other. When the detection axis of first force sensor forms angle &#x3b8; with direction of detected stress Ax, and the stress component of direction perpendicular to direction of the detected stress Ax is Az, output Apx of the axis direction of first force sensor is found as Apx=&#x3b1;(Ax&#xd7;cos &#x3b8;+Az&#xd7;sin &#x3b8;), and output Apz of the axis direction of the second force sensor is found as Apz=&#x3b1;(Ax&#xd7;sin &#x3b8;+Az&#xd7;cos &#x3b8;), and, when &#x3b1;and &#x3b1;are detection sensitivity coefficients of first and second force sensors respectively, the detection sensitivity coefficient &#x3b1;of second force sensor is set as &#x3b1;=&#x3b1;tan &#x3b8;, and the detected stress Ax is found as Ax=(Apx&#x2212;Apz)/&#x3b1;(cos &#x3b8;&#x2212;tan &#x3b8;&#xd7;sin &#x3b8;).

Stress detection method for force sensor device with multiple axis sensor and force sensor device employing this method

Stress detection method for sensor device with multiple axis sensor and sensor device employing this method

An inertial sensor such as an acceleration sensor or gyro can have superior impact resistance by regulating displacement of a weight portion in the direction of an upper limit. The sensor includes a sensor portion that has a fixing part, a weight portion the height of which is a predetermined size shorter than that of the fixing part, and a beam portion that links the weight portion and the fixing part; a plate-like first stopper portion that covers the weight portion and is bonded to the fixing part with clearance of a predetermined size from the weight portion; and a flat, plate-like second stopper portion that is connected to the fixing part via a bump of a predetermined height on the side opposite the first stopper portion.

Inertial sensor

A small-sized, high detection sensitivity and high performance acceleration sensor having directional or non-directional sensitivity is disclosed. The acceleration sensor is provided with a vibrator having uni-directional polarization and a weight connected to the vibrator. The weight is supported at the position different from the center of gravity of the total body of the vibrator and the weight itself. The vibrator is disposed so that its direction of polarization axis is either consistent or inconsistent with an axis of the torsion of the vibrator.

Acceleration sensor

A tuning-fork vibratory gyro has first and second arms and a base integrally connected to the first and second arms. The gyro includes drive electrodes used to generate tuning-fork vibrations due to a piezoelectric transversal effect, and detection electrodes provided on the first and second arms and used to output a detection voltage due to an angular velocity.

Tuning-fork vibratory gyro

Tuning fork vibratory gyro utilizing a piezoelectric transversal effect

A semiconductor integrated circuit capable of preventing propagation of noise from an output circuit to an input circuit and limiting inflow of a current caused by a protective circuit for protecting the input circuit has been disclosed. In a semiconductor integrated circuit including an input circuit 11, other circuits 12 and 13 that operate according to an output of the input circuit 11, and a plurality of power supply pins 16, 17, 18, and 19 through which a supply voltage is supplied to the input circuit 11 and other circuits 12 and 13 and to which the same supply voltage is applied, input circuit power lines 20 and 22 over which power is supplied to at least part of the input circuit 11 and general power lines 21 and 23 over which power is supplied to other circuits 12 and 13 are separated from each other. The input circuit power lines 20 and 22 and general power lines 21 and 23 are coupled to different power supply pins 16, 17, 18, and 19.

Semiconductor integrated circuit having power lines separately routed to

A piezoelectric vibrator includes a piezoelectric element having an electromechanical coupling coefficient of a thickness-extensional vibration mode greater than that of a thickness-share vibration mode, and a pair of electrodes arranged on surfaces of the piezoelectric element so that harmonic energy of the thickness-extensional vibration of the piezoelectric element is trapped.

Piezoelectric vibrator, piezoelectric vibrator device having the same

The substrate for devices 10 comprises an insulating substrate 12 of an insulating material, conducting layers 14 formed on the insulating substrate 12 and opposed to each other at a certain distance, and a dielectric film 16 formed on that portion of the insulating substrate 12 between the conducting layers 14. The substrate 10 incorporates a capacitance constituted by the opposed electric layers 14 and the dielectric film 16. A piezoelectric oscillator 20 is connected to the left and right conducting layers 14b, 14c of the substrate for devices 10. A cap 22 is connected to a boundary part of the substrate 10 through epoxy resin 24. The substrate for devices 10 with a built-in capacitance can reduce fabrication costs of a piezoelectric oscillation device and a surface acoustic wave device.

Piezoelectric oscillation device and surface acoustic wave device

A vibratory gyro including a tuning-fork vibrator having a piezoelectric member and a supporting member supporting the tuning-fork vibrator. The tuning-fork vibrator has a driving-side vibration mode and a detection-side vibration mode. The tuning-fork vibrator resonates in the driving-side vibration mode, and the tuning-fork vibrator and the supporting member resonate as a whole in the detection-side vibration mode.

Tuning-fork vibratory gyro and sensor system using the same

A vibratory gyro includes a tuning-fork vibrator having a piezoelectric member, and a supporting member supporting the tuning-fork vibrator. The tuning-fork vibrator has a driving-side vibration and a detection-side vibration. The turning-fork vibrator resonates in the driving-side vibration, and the turning-fork vibrator and the supporting member resonate as a whole in the detection-side vibration.

A method of producing a device including an impedance element provided so as to effect a series resonance, includes a step of connecting connection portions such as terminals or electrodes to be electrically connected in the device, using conductive adhesive resin. This step of connecting connection portions includes a sub-step of applying an alternating current signal which has a frequency lying in close vicinity of a resonant frequency of the device, and which has an enough amplitude to destroy an insulation film parasitically formed in the conductive adhesive resin, to input/output terminals of the device. By executing the sub-step, it is possible to substantially remove a fluctuation in impedance characteristics in dependence on the driving level, and thus to realize a stable operation of the device.

Method of producing series-resonant device using conductive adhesive

A surface acoustic wave filter which comprises a substrate of piezoelectric material and a multistrip coupler. The multistrip coupler comprises a plurality of parallel conductive strips formed on the substrate; at least one input transducer is disposed on one side of the multistrip coupler, and at least one output transducer is disposed on the other side of the multistrip coupler. The surface acoustic wave filter is characterized in that a part of the middle portion of each of the conductive strips of the multistrip coupler is made of a photoconductive material.

Surface acoustic wave filter

An acoustic surface wave device comprises a piezoelectric substrate (1), an input transducer (2), an output transducer (3) and acoustical absorbent layer patterns (5, 6) for absorbing undesired acoustic surface waves and bulk waves (S.sub.4, S.sub.5). Each of the acoustical absorbent layer patterns (5, 6) has zigzag-shaped or triangular shaped edges, i.e., a recess portion (R.sub.1, R.sub.3) and a protruding portion (R.sub.2, R.sub.4). The recess portion has a further recess portion (R.sub.1 ', R.sub.3 ') which is formed diagonally with respect to the propagation path of acoustic surface waves.

Acoustic surface wave device with improved band-pass characteristics

A surface acoustic wave filter which comprises: a substrate of piezoelectric material; a multistrip coupler for changing the track of a signal comprising a plurality of parallel conductive strips; at least two transducers disposed on one side of the multistrip coupler; at least another two transducers disposed on the other side of the multistrip coupler. The latter two transducers facing the former two transducers. One pair of the transducers which face each other through the multistrip coupler constitutes input transducers while the other pair of the transducers constitutes output transducers.

Growing community of inventors

Kanagawa, Japan

Masaaki Ono