Fujikin Inc.

Other

Tohoku University

Tokushima University

Tokyo Electron Limited

Tokyo Electron Limi Ted

Tadahiro Ohmi

Futikin Incorporated

Fujkin Incorporated

Masaaki Nagase

Nobukazu Ikeda

Kouji Nishino

Ryousuke Dohi

Kaoru Hirata

Atsushi Hidaka

Katsuyuki Sugita

Yohei Sawada

Michio Yamaji

Kazuteru Tanaka

Satoru Yamashita

Yoshihiro Deguchi

Tsutomu Shinohara

Takashi Hirose

Ryutaro Nishimura

Atsushi Matsumoto

Tadayuki Yakushijin

Keiji Hirao

Toshihide Yoshida

Masahiko Takimoto

Kazuyuki Miura

Hisashi Tanaka

Tomokazu Imai

Tsuyoshi Shimazu

Shoichi Hino

Masahito Saito

Tomio Uno

Takatoshi Nakatani

Keisuke Ideguchi

Kazuyuki Morisaki

Masayoshi Kawashima

Osamu Nakamura

Shinya Ogawa

Masafumi Kitano

Hiroyuki Ito

Kyousuke Dohi

Hidekazu Ishii

Shigetoshi Sugawa

Eiji Takahashi

Takeshi Nakamura

Norihiko Amikura

Yasuyuki Shirai

Kazuhiko Sugiyama

Takahiro Matsuda

Rihito Kuroda

Kenji Aikawa

Risako Miyoshi

Takahiro Imai

Takashi Fukawa

Kenetu Mizusawa

Akniobu Teramoto

Atsushi Nagata

Atushi Hidaka

Tooru Hirai

Taiki Hattori

Tetsuo Naritomi

Kosuke Sugimoto

Keiichi Hasegawa

A concentration measurement devicefor measuring the concentration of the a gas flowing through a junction blockconnected to a plurality of gas supply lines includes a light sourcefor generating light incident to a flow path formed in the junction block, a photodetectorfor receiving light emitting from the flow path, and an arithmetic control circuitfor determining the concentration of the gas flowing through the flow path based on the output of the photodetector, translucent incident windowsandfor making light from the light source incident to the flow path and, at least one of the translucent emitting windowsandfor emitting light passing through the flow path being sealed and fixed to the junction block

Concentration measurement device

A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.

Controller and vaporization supply device

The flow rate control deviceincludes a control valve, a restriction partprovided downstream of the control valve, an upstream pressure sensorfor measuring a pressure Pbetween the control valveand the restriction part, a differential pressure sensorfor measuring a differential pressure ΔP between the upstream and the downstream of the restriction part, and an arithmetic control circuitconnected to the control valve, the upstream pressure sensor, and the differential pressure sensor

Flow rate control device

The concentration measurement deviceincludes an electric unithaving a light sourceand a photodetector, a fluid unithaving a measurement cell, a first light-transmission memberfor transmitting light from the light source to the measurement cell, a second light transmission memberfor transmitting light from the measurement cell to the photodetector, a lensA provided in the fluid unit, the lensA being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensorfor measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuitfor detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.

Density measurement device

A concentration measurement method performed in a concentration measurement device including an electric unit having a light source and a photodetector, a fluid unit having a measurement cell through which a gas flows, and a processing circuit for calculating a concentration of the gas based on an intensity of a light passing through the measurement cell. The concentration measurement method includes a step of determining an absorption coefficient of the measurement gas using a reference absorption coefficient determined in association with the reference gas and a correction factor associated with the measurement gas, and a step of obtaining a concentration of the measurement gas flowing in the measurement cell using the absorption coefficient of the measurement gas. When the absorption peak wavelength of the measurement gas is longer than the peak wavelength of the light source, a reference gas having a longer absorption peak wavelength than the peak wavelength of the light source is used, and when the absorption peak wavelength of the measurement gas is shorter than the peak wavelength of the light source, a reference gas having a shorter absorption peak wavelength than the peak wavelength of the light source is used.

Concentration measuring method, and concentration measuring device

An abnormality detection method is performed in a gas supply system including a flow rate control device having a restriction part, a control valve, a flow rate control pressure sensor for measuring upstream pressure, and a control circuit. The inflow pressure sensor measures the supply pressure. An upstream on/off valve is provided upstream of the inflow pressure sensor. The method includes closing the upstream on/off valve when the gas flows at a controlled flow rate at the downstream of the restriction part by controlling an opening degree of the control valve based on the output of the flow rate control pressure sensor; measuring a drop in supply pressure on the upstream side of the control valve after closing the upstream on/off valve while keeping the control valve open; and detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.

Abnormality detection method for flow rate control device, and flow rate monitoring method

A diaphragm valve includes a body () having a flow path (), a seat () formed in the flow path (), a metal diaphragm () for opening and closing the flow path (), a pair of clamping parts () and () for claiming peripheral edge portions of the metal diaphragm () to fix the metal diaphragm () to the body (), and an actuator () for abutting the metal diaphragm () to the seat () or separating the metal diaphragm from the seat (), wherein a fluorine resin coating is formed on a seat side surface () of the metal diaphragm () at least in a contact region (B-A) with the seat () in a region (C) surrounded by a clamping region (D-C) between the seat side surface () and one of the pair of clamping portions (), excluding the clamping region (D-C).

Diaphragm valve

A Concentration measurement devicecomprises: a measurement cellhaving a flow path through which a gas flows, a light sourcefor generating incident light to the measurement cell, a photodetectorfor detecting light emitted from the measurement cell, a pressure sensorfor detecting a pressure of the gas in the measurement cell, a temperature sensorfor detecting a temperature of the gas in the measurement cell, and an arithmetic circuitfor calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient &#x3b1;, wherein the arithmetic circuitis configured to calculate the concentration using the extinction coefficient &#x3b1; determined on the basis of the output of the temperature sensor

The concentration measurement deviceincludes an electric unithaving a light sourceand a photodetector, a fluid unithaving a measurement cell, optical fibersandfor connecting the electric unitand the fluid unitand is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light sourceto the measurement cell and then emitted from the measurement cell by the photodetector, where optical connection partsandconnected to the optical fibersand the light sourceor the photodetectorare integrally provided in the electric unit

A concentration measurement deviceincludes a light sourcefor generating incident light to a measurement spaceA, a photodetectorfor receiving light emitted from the measurement space, and an arithmetic control circuitfor calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting elementfor generating light having a first wavelength, and a second light-emitting elementfor generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.

A concentration measuring devicecomprises: a measurement cellhaving a flow path, a light source, a photodetectorfor detecting light emitted from the measurement cell, and an arithmetic circuitfor calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portionfixed to the cell body so as to contact the flow path, and a reflective memberfor reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell bodyby a window holding membervia a gasket, an annular sealing protrusionis provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusionis also provided on a support surfaceof the cell body for supporting the second surface opposite to the first surface of the gasket.

A control unitof a flow rate control systemcomprises: a recording unitfor recording measured values of a pressure sensor P and a temperature sensor T, a storage unitfor storing volume data between a first valve Vand a second valve Vcorresponding to the measured value of the pressure sensor P, and an arithmetic unitfor calculating a flow rate based on a first pressure value Pand a first temperature value Tmeasured after opening the first valve Vand the second valve Vto flow a gas and then closing the first valve Vand the second valve Vsimultaneously in a state where the gas is flowing; a second pressure value Pand a second temperature value Tmeasured after opening the first valve Vand the second valve Vto flow a gas, closing the second valve Vin a state where the gas is flowing, and then closing the first valve Vafter a predetermined time &#x394;t has elapsed; and a volume value V between the first valve Vand the second valve Vwhich corresponds to the second pressure value P

Flow rate control system and flow rate measurement method

A concentration measurement method is performed using a concentration measurement device comprising: a measurement cell for flowing a fluid to be measured; a light source for generating light incident on the measurement cell; a photodetector for detecting light emitted from the measurement cell; an arithmetic unit for calculating the absorbance and concentration of the fluid to be measured based on an output of the photodetector; and a temperature sensor for measuring the temperature of the fluid to be measured. The concentration measurement method includes: a step of flowing a gas whose molecular structure varies with the temperature as the fluid to be measured in the measurement cell; a step of making light of a wavelength absorbable by the fluid to be measured to be incident from the light source to the measurement cell; a step of measuring the intensity of light emitted from the measurement cell by the photodetector; and a step of calculating the concentration of the fluid to be measured based on the temperature and the output of the photodetector measured by the temperature sensor.

Concentration measurement method

A fluid control system () comprises: a first valve () provided downstream of a flow rate controller (), a flow rate measuring device () provided downstream of the first valve () and having a second valve (), an open/close detector () provided to the second valve (), and a controller () for controlling an open/close operation of the first valve () and the second valve (), and the controller () controls the open/close operation of the first valve () in response to a signal output from the open/close detector ().

Fluid control system and flow rate measurement method

Growing community of inventors

Osaka, Japan

Masaaki Nagase