Mitsubishi Chemical Corporation

Mitsubishi Kasei Engineering Company

Jeol Ltd.

Mitsubishi Kasei Corporation

Mitsubishi Kasei Engineering Corporation

Masaaki Mita

Kenji Sugimoto

Katashi Shioda

Seiji Sudoh

Moriyoshi Kudoh

Haruo Katsumata

Masumi Hino

Takahisa Fukao

Furuto Seiryo

Moriyoshi Kudo

An electron beam apparatus is offered which is capable of being used optimally over a wide range of electron beam currents. A method of controlling this apparatus is also offered. The apparatus has an electron emitter for producing an electron beam. The beam is collimated or slightly converged (made a real-image mode beam) by the first condenser lens. As a result, the amount of the electron beam limited by the anode electrode can be reduced to a minimum. The excitation of the first condenser lens is fixed to parallel beam conditions and so movement of the virtual electron source is prevented. This can enhance the axial accuracy.

Electron beam apparatus and method of controlling same

A method of separating a liquid by pervaporation, which includes purifying a liquid to be treated by at least one pervaporation membrane module unit providing a supply line connected to the pervaporation membrane module unit and supplying the liquid to be treated to the membrane module unit, utilizing a withdrawing line for withdrawing the permeated fluid from the membrane module unit and a withdrawing line for withdrawing the non-permeated liquid, wherein the supply line is provided with a pressure pump for transporting the liquid and a heater, and providing the final withdrawing line for the non-permeated liquid with a pressure regulating valve. At least one pervaporation membrane module unit includes a plurality of pervaporation membrane module units which are connected so that the non-permeated liquid of a first stage pervaporation membrane module unit is supplied to a second stage pervaporation membrane module unit, and the non-permeated liquid of an n-1 stage pervaporation membrane module unit is supplied to an n stage pervaporation membrane module unit, wherein the fluid permeating through the first stage pervaporation membrane module unit is steam. The steam permeated through the first stage pervaporation membrane module unit is condensed by a condenser with a refrigerant temperature of at least 0 degree Celsius and steam permeated through at least one of the second and subsequent stage pervaporation membrane module units is, after incorporating an organic solvent compatible with water, condensed by a condenser with a refrigerant temperature of at most 0 degree Celsius.

Method for separating a liquid mixture using a pervaporation membrane

An apparatus for separating a liquid by pervaporation, which comprises at least one pervaporation membrane module unit for purifying a liquid to be treated, a supply line connected to said pervaporation membrane module unit for supplying the liquid to be treated to the membrane module unit, a withdrawing line for withdrawing the permeated fluid from the membrane module unit and a withdrawing line for withdrawing the non-permeated liquid, wherein said supply line is provided with a pressure pump for transporting the liquid and a heater, and the final withdrawing line for the non-permeated liquid is provided with a pressure regulating valve.

Apparatus for separating a liquid mixture

Apparatus for separating a liquid mixture by pervaporation

A method of separating a liquid mixture wherein the liquid mixture is heated; the heated liquid mixture is supplied to a pervaporation membrane module to separate a permeable component of the liquid; a portion of non-permeated liquid is circulated through a circulation pipe into a liquid mixture feeding pipe before a heater, and the remaining portion of the non-permeated liquid is extracted to the outside of the system, and wherein the temperature of the liquid in the liquid mixture feeding pipe in which the non-permeated liquid has been mixed with the liquid mixture or in the circulation pipe for the non-permeated liquid, is measured, and when the measured temperature is out of a predetermined range, new supply of the liquid mixture and/or extraction of the non-permeated liquid is stopped.

Method of and an apparatus for separating a liquid mixture

A hydrophilic drying liquid such as isopropyl alcohol is evaporated and supplied to an object to be dried such as an electronic component. As the drying liquid is condensed on the surface of the object and flows down together with water adhering to the object, the object is dried. Water contained in the condensate is removed by means of a membrane-type separator disposed in the liquid or vapor of the drying liquid. A rise in the water concentration in the drying liquid is prevented so as to maintain high drying efficiency.

Vapor drier

Growing community of inventors

Kitakyushu, Japan

Masaaki Mita