Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,326 patents)
1 patent:
1. 7604845 - Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating method