Ebara Corporation

Other

Masaaki Kajiyama

Masao Matsumura

Takeshi Yoshioka

Fumio Kondo

Norio Kimura

Masahiro Hatakeyama

Hiroyuki Shinozaki

Yukio Ikeda

Takao Kato

Satoshi Mori

Katsunori Ichiki

Yotaro Hatamura

Masayoshi Hirose

Katsuyuki Aoki

Yoichi Kanemitsu

Yuji Shirao

Katsuaki Usui

Masayuki Nakao

Mitsunao Shibasaki

Masaru Nakaniwa

Takashi Tsuzuki

Masato Eguchi

Noriyuki Takeuchi

A spraying device for conveniently spraying a plurality of cleaning liquids, e.g., a chemical solution and pure water, over a workpiece, includes sprayer body defining therein a plurality of fluid passages. The fluid passages are separate from each other, and each of the fluid passages is communicated to a respective nozzle portion having a nozzle outlet at a nozzle surface defined on an outer surface of the sprayer body. The nozzle portions communicating each of the different fluid passages have substantially the same distribution in the nozzle surface.

Spraying device

A micro-working apparatus performs fabrication and assembly tasks for micron/nanometer sized objects while progress of operations is observed in real-time by at least a pair of optical or electron microscopes to provide simultaneous views from at least two directions. This offers spatial visual information regarding the working space which is particularly critical in micro-working. Micro-working is further facilitated by the use of a micro-pallet device specially designed for use in the apparatus, but also offering other application possibilities. Rotational and parallel translation movements provided by the micro-pallet combined with the micro-working capability of the apparatus are utilized to enable production of micron-sized parts for use in advanced applications of optical and electronic devices.

Micro-processing apparatus and method therefor

Magnetic levitation conveyor apparatus

Substrate transportation system

Several vacuum process steps are applied to substrates such as a wafer using a vacuum container for storing and transporting the substrates under vacuum. The vacuum container comprises a container body having a main opening for inserting a substrate and taking out the substrate, a lid engageable with the container body for closing and sealing the main opening of the container body, and a gate provided on one of the container body and the lid for performing at least one of evacuating an interior of the vacuum container and raising the pressure of the interior of the vacuum container to ambient.

Vacuum processing system

Growing community of inventors

Fujisawa, Japan

Masaaki Kajiyama