Hitachi, Ltd.

Hitachi Plant Technologies, Ltd.

Masaaki Ito

Tatsuo Harada

Shigeo Moriyama

Tadakatsu Nakajima

Toshihiko Fukushima

Eiji Takeda

Kozo Mochiji

Takashi Soga

Toshiaki Kita

Taro Ogawa

Hiroaki Oizumi

Tatsuharu Yamamoto

Hiroaki Imai

Yukinori Nakayama

A bonding apparatus, suitable for accurately bonding large substrates for a liquid crystal display, includes Z-axis drive mechanisms, and upper and lower chambers. The Z-axis drive mechanisms for moving an upper frame vertically are disposed at four corners of a mount. The upper chamber is supported by the upper frame and has an upper table inside. The lower chamber has a lower table inside and is supported on the mount. The upper and lower chambers are united through a seal ring to define a vacuum chamber. Moving the upper frame moves the upper chamber vertically to open or close the vacuum chamber. The lower table is supported via a free joint stage between the plurality of support legs and the table, and is moved horizontally by a side thrust mechanism disposed outside of the vacuum chamber.

Substrate assembly apparatus and substrate assembly method

A cogeneration system in which cold is generated by recovering exhaust heat of a gas turbine for driving a generator to drive a refrigerating machine, and the cold is used for cooling intake air for the gas turbine and as a cold heat source for an air conditioner, wherein there are provided a thermal storage tank for storing the cold generated by the refrigerating machine and an electric energy storage equipment for storing electric energy generated by the generator; and cooling of the intake air for the gas turbine, thermal storage, and electric energy storage are controlled in relation to the load of the air conditioner and the electric power load of the generator.

Cogeneration system

An optical element which allows replication of a refined pattern and a projection exposure apparatus employing the optical element are disposed so that side face portions of predetermined patterns which create shadows from oblique incident exposure radiation may be minimized at a predetermined incidence angle of vacuum ultrasonic radiation or X-radiation, or the patterns of the optical element are formed such that the direction in which incident radiation is reflected regularly and the direction of side faces of the patterns may extend in parallel to each other. When the optical element is irradiated to replicate or image the patterns of the optical element, refined patterns can be replicated or imaged.

Optical element and projection exposure apparatus employing the same

Monochrometer

In an apparatus for precisely moving a table, rectilinear drive systems for both X- and Y-axes are fixed to a support frame, a movable stage is constructed so as to have its motion in the direction of one of these axes constrained by the motion of the rectilinear drive system for the one axis and to have its motion in the direction of the other axis constrained by the rectilinear motion of the rectilinear drive system for the other axis, and means for coupling the rectilinear drive system for at least one of the axes and the movable stage so as to have a backlash.

Apparatus for precisely moving a table

An apparatus for moving a table or a stage having movable parts adapted to be guided by guide rail means slidingly and rectilinearly. At least the movable parts are made of a non-iron light metal material. The sliding surfaces of the movable parts making sliding contact with the guide rail means are made of a self-lubricating material, while the sliding surfaces of the guide rail means making sliding contact with the movable parts are made of a material having a higher hardness and wear resistance than the non-iron light metal material, so that the weight of at least the movable parts is reduced to decrease the weight of the apparatus as a whole.

Apparatus for moving table on stage

Growing community of inventors

Tsuchiura, Japan

Masaaki Ito