Tdk Corporation

Masaaki Imura

Eiju Komuro

Roger William Whatmore

Hisatoshi Saitou

Paul B Kirby

Qingxin Su

Kenji Inoue

Takao Noguchi

Katsuhiko Gunji

Taku Takeishi

Joseph Edward Albert Southin

A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, an electrode material layer for forming an upper electrode above the piezoelectric film, forms a mask of a predetermined form on the electrode material layer, and then etches the electrode material layer to form the upper electrode. Before a step of forming the electrode material layer, a protective layer for protecting the piezoelectric film during etching of the electrode material layer is formed so as to cover at least a part of the piezoelectric film where the upper electrode is not formed, and the electrode material layer is then formed so as to cover the protective layer.

Method of manufacturing a piezoelectric thin film resonator, manufacturing apparatus for a piezoelectric thin film resonator, piezoelectric thin film resonator, and electronic component

A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two series FBARs form part of a signal line of a coplanar waveguide transmission line. The top electrodes of the two series FBARs are connected to associated circuitry. The two series FBARs have a common bottom electrode.

Film bulk acoustic resonator filter

Multiple thin film bulk acoustic resonators () configured in series () and parallel () within a coplanar waveguide line structure provides a compact ladder filter. The resonators () are formed over an opening () in a substrate () and connected to associated circuitry by one or more transmission lines formed on the substrate (). The arrangement of the resonators () between the ground and signal lines of a coplanar line structure provides a means of minimising the area of the filter. Embedding a ladder filter within the coplanar transmission line structure eliminates the need for wire bonds, thus simplifying fabrication. Embodiments for 2&#xd7;2, and hither order filters are described.

Film bulk acoustic resonator filters with a coplanar waveguide

A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layeron the piezoelectric film, a second step of coating the upper electrode layerwith a resistand of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resistand removing the upper electrode layerother than masked portions and forming two or more first upper electrodes, a fourth step of removing the resist, a fifth step of coating the first upper electrodeswith a resist and performing patterning on the resist so that the first upper electrodesare partially exposed, a sixth step of etching each of the exposed first upper electrodesby a specified thickness to form a second upper electrode, and a seventh step of removing the resist

Method for manufacturing piezo-resonator

A thin-film piezoelectric resonator including a piezoelectric thin film having piezoelectric characteristic, and an upper electrode and a lower electrode arranged on opposite surfaces of the piezoelectric thin film for applying an excitation voltage to the piezoelectric thin film, wherein: each of the upper electrode and the lower electrode includes a resonant portion, and a lead-out portion; and the electrode thickness of at least one part of the lead-out portion in at least one of the upper electrode and the lower electrode is larger than the electrode thickness of the resonant portion formed to be continued from the lead-out portion.

Growing community of inventors

Tokyo, Japan

Masaaki Imura