Shin-etsu Quartz Products Co., Ltd.

Heraeus Quarzglas Gmbh

Shin-etsu Handotai Co., Ltd.

Shin-etsu Quartz Products Col, Ltd.

Masaaki Aoyama

Akira Fujinoki

Atsushi Iwasaki

Yasuhiko Sato

Nobuyoshi Ogino

Hiroshi Matsui

Mitsuo Matsumura

Kiyoshi Yokokawa

Eiichi Shinomiya

Gerhart Vilsmeier

Akira Uchikawa

Toshio Fukuoka

Hiroyuki Miyazawa

A quartz glass tube, produced by mechanically processing a natural/synthetic quartz glass mother material, having 50-300 mm.phi. in outer diameter, from. 1 to 7 in outer to inner diameter ratio, 10 mm or more in thickness and 2% or less in thickness error; a large-scale quartz glass preform integrally combining the large-sized quartz glass tube with a core glass rod for an optical fiber using a rod-in-tube technique; and a method for manufacturing a large-scale quartz glass preform performing the mechanical processing with a high precision machine, i.e., integrating a core rod for an optical fiber under a rod in process with a quartz glass tube, a tube diameter of which is controlled by heating, hot drawing or hot drawing with pressure by using a tool-free drawing method.

Large sized quartz glass tube, large scale quartz glass preform, process

A method for fabricating a large-sized primary treated quartz glass tube by perforating a cylindrical quartz glass mother material by a hot carbon drill press-in-process followed by etching and washing. The large-sized primary treated quartz glass tube is converted to a large-sized quartz glass preform by combining it with a core glass rod for an optical fiber. Another embodiment is a method for fabricating a large-sized quartz glass tube by heating, hot drawing or hot drawing under pressure using a tool-free drawing method under control of an inside pressure of the large-sized primary treated quartz glass tube at a temperature ranging from 1600.degree. C. to 3000.degree. C. to satisfy a specific equation.

Method for manufacturing large-sized quartz glass tube

A reactor vessel includes a quartz glass body having sidewalls and a ceiling formed as a single unit without welds. Translucent or opaque portions are formed by bubbles in the glass where heat insulation is desired and transparent portions are formed by absence of bubbles where heat transmission and visibility are desired. The body is formed by adding quartz glass powder to a mold which is rotated about a central axis so that centrifugal force causes a layer of powder to form on the inside of the mold. The layer is then heated until it melts.

Single-wafer heat-treatment apparatus and method of manufacturing

A quartz glass crucible adapted for use in a process for pulling a single crystal semiconductor material having an opaque outer substrate of a quartz glass with a relatively high bubble content and an inner transparent glass layer which is substantially free from bubbles. The crucible is produced while the substrate is supported by a rotating mould by forming an atmosphere of high temperature gas and supplying a metered quantity of powders of quartz to the high temperature gas atmosphere to have the quartz powders molten at least partly and directed toward an inner surface of the substrate to be adhered thereon.

Manufacture of a quartz glass vessel for the growth of single crystal

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Kouriyama, Japan

Masaaki Aoyama