Kla Tencor Corporation

Kla-tencor Technologies Corporation

Maruti Shanbhag

Patrick Huet

Sandeep Bhagwat

Robinson Piramuthu

Lisheng Gao

Martin Plihal

Ashok V Kulkarni

Kenong Wu

Tong Huang

Sharon McCauley

Cecelia Anne Campochiaro

David Winslow Randall

Michal Kowalski

Jianxin Zhang

Vivekanand Kini

Ariel Tribble

Peter Eldredge

Shaio Roan

Kai Liu

Kai Chi

Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface. The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data.

Flexible hybrid defect classification for semiconductor manufacturing

A system for determining an assigned classification for a set of physical events on a substrate. Sensors sense the physical events on the substrate and produce event data. A plug in rule module manager receives and manages any number of plug in rule modules. Each plug in rule module has an input, a local filter, an analyzer, and an output. The input receives the event data and confidence values from preceding plug in rule modules. The local filter analyzes the received confidence values from the preceding plug in rule modules and selectively by passes the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules. The analyzer analyzes the event data in view of a given classification associated with the plug in rule module, and assigns a confidence value based at least in part upon how well the event data fits the given classification. The output provides the confidence value to subsequent plug in rule modules. A post processor receives the confidence values provided by the plug in rule modules, and makes a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.

Spatial signature analysis

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Bengaluru, India

Maruti Shanbhag