International Business Machines Corporation

Maruf Amin Bhuiyan

Ruilong Xie

Julien Frougier

Veeraraghavan S Basker

Nicolas J Loubet

Andrew Mark Greene

Ardasheir Rahman

Eric Miller

Embodiments described herein provide for integrated input/output and logic devices for nanosheet technology and methods of fabrication for the devices. The types of transistors used for input/output devices and logic devices may differ such that, for example, input/output devices may use EG (Extended Gate) Field Effect Transistors (FET) while logic devices may use Suspended Gate (SG) FETs. Co-locating SG and EG devices on a single die provides for a fabricator to assure alignment between the nanosheets used in the SG and EG devices (improving consistency in the device characteristics on a single die) and reduce overall space requirements for the hardware used by input/output and logic devices.

Integrated input output and logic device for nanosheet technology

A gate-all-around device includes a plurality of channel layers vertically stacked over a substrate, an inner spacer located between each of the plurality of channel layers, source/drain regions in contact with opposite ends of a first portion of the plurality of channel layers, and a first dielectric layer on opposite ends of a second portion of the plurality of channel layers located in a spacer region that is adjacent to the source/drain regions. A width of the first dielectric layer and the second portion of the plurality of channel layers is equal to a width of the inner spacer located between each of the plurality of channel layers.

Channel protection of gate-all-around devices for performance optimization

A semiconductor device includes a semiconductor substrate, a first pair of FET (field effect transistor) gate structures separated by a first gate canyon having a first gate canyon spacing, disposed upon the semiconductor substrate, a second pair of FET gate structures separated by a second gate canyon having a second gate canyon spacing, disposed upon the substrate, a first S/D (source/drain region disposed in the first gate canyon, a second S/D region disposed in the second gate canyon, a first BDI (bottom dielectric isolation) element disposed below the first S/D region and having a first BDI thickness, and a second BDI element disposed below the second S/D region and having a second BDI thickness. The first BDI thickness exceeds the second BDI thickness.

Gate-all-around field effect transistor with bottom dielectric isolation

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Albany, NY, United States of America

Maruf Amin Bhuiyan