Vaisala Oy

Teknologian Tutkimuskeskus Vtt Oy

Teknologian Tutkimuskeskus Vtt

Vaisala Oyj

Instrumentarium Oy

Valtion Teknillinen Tutkimuskeskus

Valtion Teknillinen

Martti Blomberg

Ari Lehto

Markku Orpana

Altti Torkkeli

Hannu Kattelus

Stefan Lindblad

Heikki Saari

Jarkko Antila

Simo Tammela

Yrjo Koskinen

Riikka Puurunen

Hannu Kattellus

Hannu Talvitie

Jukka Korhonen

Anssi Korhonen

Sari Elomaa

This disclosure describes a capacitively controlled Fabry-Perot interferometer which comprises a first mirror layer with a first metallic thin-film layer embedded in a first insulating layer and a second mirror layer with a second metallic thin-film layer embedded within a second insulating layer. A control region in the first metallic thin-film layer is at least partly aligned in an actuation direction with a control region in the second metallic thin-film layer. The interferometer also comprises a first control electrode and a first dielectric layer, and the first dielectric layer lies between the first control electrode and at least a part of the control region of the first metallic thin-film layer.

Capacitively controlled fabry-perot interferometer

Electrically tunable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Producing interferometers with prior art processes includes costly and complicated production phases. Therefore, it has not been possible to apply interferometers in consumer mass products. According to the present solution, the Fabry-Perot cavity is made by removing a sacrificial layer () which has been polymer material. A mirror layer (-) which is produced above the sacrificial layer can be made with atomic layer deposition technology, for example. According to a preferable embodiment, electrodes () of the mirror structures are formed by using sputtering or evaporation. With the present solution it is possible to avoid the above mentioned problems related with prior art.

Electrically tunable fabry-perot interferometer, an intermediate product an electrode arrangement and a method for producing an electrically tunable fabry-perot interferometer

A layered infrared emitter structure includes only semi-transparent metal layers, preferably one semi-transparent metal layer, and one or more dielectric layers on both sides of the semi-transparent metal layer. Further, an electric heating wiring is arranged in or between any of the dielectric layers to heat the semi-transparent metal layer up to a required infrared emission temperature, preferably to a temperature within a range from 400&#xb0; C. to 1000&#xb0; C.

Infrared emitter having a layered structure

The present publication describes a heat-resistant optical layered structure, a manufacturing method for a layered structure, and the use of a layered structure as a detector, emitter, and reflecting surface. The layered structure comprises a reflecting layer, an optical structure on top of the reflecting layer, and preferably shielding layers for shielding the reflecting layer and the optical structure. According to the invention, the optical structure on top of the reflecting layer comprises at least one partially transparent layer, which is optically fitted at a distance to the reflecting layer.

Layered structure for an infrared emitter, infrared emitter device and detector

Controllable Fabry-Perot interferometers include two mirrors with a space between them. The mirrors are such that at least one layer is made of silicon-rich silicon nitride. Additionally, the mirrors' surfaces are formed to be of a roughness which reduces the risk of the mirrors sticking to each other.

Micromechanical tunable Fabry-Perot interferometer, an intermediate product, and a method for producing the same

The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap in at least one mirror, serving as a layer of the mirror. The other layers of the mirrors can be made of polycrystalline silicon, which has a negligible attenuation at the infrared range. It is also preferable to provide a hole or a recess in a substrate at the optical area of the interferometer.

Micromechanical tunable Fabry-Perot interferometer and a method for producing the same

The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. The prior art interferometers have a temperature drift which causes inaccuracy and requirement for complicated packaging. According to the invention the interferometer arrangement has both an electrically tuneable interferometer and a reference interferometer on the same substrate. The temperature drift is measured with the reference interferometer and this information is used for compensating the measurement with the tuneable interferometer. The measurement accuracy and stability can thus be improved and requirements for packaging are lighter.

Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same

A capacitive pressure sensor structure, in particular for measurement of absolute pressure, and a method for manufacturing the sensor. The sensor includes at least one fixed electrode, and at least one movable electrode electrically isolated from said fixed electrode and spaced apart from said fixed electrode. A portion of said movable electrode is formed from a porous polycrystalline silicon layer that in a finished component remains as an integral portion of said flexibly movable electrode.

Surface-micromachined absolute pressure sensor and a method for manufacturing thereof

The invention is related to an electrically modulatable thermal radiant source with a multilayer structure. The radiant source includes a substrate, a first insulating layer formed onto the substrate, a radiant surface layer formed onto the first insulating layer, a second insulating layer formed on the radiant surface layer, a first metallization (incandescent filament) layer formed on the second insulating layer, a third insulating layer formed on the first metallization layer, and a second metallization layer for contacting formed on the third insulating layer. According to the invention, very thin incandescent filaments are formed from the first metallization layer and surrounded by the other elements of the multilayer structure as a uniform, planar plate.

Electrically modulatable thermal radiant source with specific filament

A miniaturized spectrometer for gas concentration measurement includes a radiation source for admitting electromagnetic radiation onto the gas to be measured, a detector for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer placed in the path of the radiation prior to the detector, control electronics circuitry for controlling the radiation source, the interferometer and the detector. The radiation source, the detector, the interferometer and the control electronics are integrated in a miniaturized fashion onto a common, planar substrate and the radiation source is an electrically modulatable micromechanically manufactured thermal radiation emitter.

Miniaturized fabry-perot spectrometer for optical analysis

A single-channel gas concentration measurement method and apparatus. According to the method, a radiant source is employed to generate a measuring signal, the measuring signal is subsequently directed to a measurement object containing a gas mixture to be measured, the measuring signal is subsequently bandpass filtered using at least two passband wavelengths, and the filtered measuring signals are detected by a detector. According to the invention, the bandpass filtering step is implemented by a single electrostatically tunable, short-resonator Fabry-Perot interferometer.

Single-channel gas concentration measurement method and apparatus using

An electrically modulatable radiant source includes an essentially planar substrate, a well or hole formed in the substrate, and at least one incandescent filament attached to the substrate. The incandescent filament is aligned with the well or hole and is formed of a metallic compound which readily oxidizes at an operating temperature of the incandescent filament. An oxidation resistant film encapsulates the incandescent filament to prevent the filament from oxidizing. Furthermore, contact pads are formed on the substrate at both ends of the incandescent filament for feeding electric current to the incandescent filament.

Thermal radiant source with filament encapsulated in protective film

An electrostatically tunable Fabry-Perot interferometer produced by surface micromechanical techniques is used in optical material analysis as an optical sweeping filter in which the optical measurement wavelength is centered at a wavelength .lambda.. The Fabry-Perot interferometer based sensor structure comprises a body block, two essentially parallel mirrors bonded to the body block, of which mirrors at least one is partially transmitting and movable relative to the body block. The mirrors are spaced maximally by a few half-wavelengths, .lambda./2, from each other, and both of the mirror structures include integral electrode structures capable of effecting an electrostatic force between the mirror structures. The movable mirror structure is provided with structurally weakened regions surrounding the optical area of the mirror so as to facilitate keeping the optical area at a maximum degree of flatness. At least one of the electrode structures surrounds the optical area so as to achieve a mechanical lever action and avoid galvanic contact between the electrode of the movable mirror structure and the electrode of the fixed mirror structure.

Electrically tunable fabry-perot interferometer produced by surface

A radiant source including an essentially planar substrate having a well or hole formed therein. At least one incandescent filament is mounted to the substrate and aligned at the well or hole. Contact pads are formed onto the substrate, to both ends of the incandescent filament, and feed electric current to the incandescent filament. Furthermore, each incandescent filament is doped with phosphorus to an impurity concentration of at least 5.times.10.sup.19 atoms/cm.sup.3.

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Espoo, Finland

Martti Blomberg