Asml Netherlands B.v.

Aslm Netherlands B.v.

Martinus Arnoldus Henricus Terken

Hernes Jacobs

Harmen Klaas Van Der Schoot

Petrus Mathijs Henricus Vosters

Johannes Henricus Wilhelmus Jacobs

Koen Jacobus Johannes Maria Zaal

Frits Van Der Meulen

Wilhelmus Josephus Box

Antonius Johannes Josephus Van Dijsseldonk

Petrus Matthijs Henricus Vosters

Marius Ravensbergen

Robert Gordon Livesey

Mustafa Amhaouch

Franciscus Catharina Bernardus Marinus Van Vroonhoven

Petrus M H Vosters

Koen J J M Zaal

Harmen Klass Van Der Schoot

An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.

Lithographic apparatus having a Lorentz actuator with a composite carrier

Lithographic apparatus having a lorentz actuator with a composite carrier

A vacuum operated lithographic apparatus includes a vacuum housing for providing a vacuum environment to a support constructed to support a patterning device, or a substrate table, or a projection system, or any combination thereof. An interior of the vacuum housing includes a plurality of transport circuits for transporting fluids and/or electrical signals for use in a first process mode for lithographic processing. At least one of the transport circuits is adapted to transport energy towards the interior of the vacuum housing to stimulate outgassing in the vacuum housing for use in a second process mode for bringing the lithographic apparatus into a vacuum operating condition.

Lithographic apparatus

A movable carriage for moving an article support member in a lithographic apparatus is provided. The article support member is constructed and arranged to move and support an article to be placed in a beam path of the lithographic apparatus. The carriage includes a compartmented composite structure.

Movable carriage for a lithographic apparatus and device manufacturing method

A lithographic projection apparatus is presented herein that includes a collision protection system for protecting internal components against damage from a collision. The collision protection apparatus includes at least one damper for applying a braking force and/or for absorbing a collision force, reducing or eliminating any damage to delicate and costly parts. The collision protection apparatus can also monitor the position and velocity of a moving part to determine when a collision is likely to occur.

Lithographic apparatus, device manufacturing method, and device manufactured thereby

A lithographic apparatus includes at least one object support structure in a high vacuum chamber. The object support structure includes a carrier device in which a number of dividing walls are provided forming a number of compartments in the carrier device. At least one of the compartments is shielded from the high vacuum chamber and is provided with separate gas evacuating structures.

Lithographic apparatus and device manufacturing method

A lithographic apparatus is provided. The apparatus includes an illumination system that conditions a beam of radiation, an article support member that supports an article to be placed in a beam path of the beam of radiation on the article support, and a movable carriage for moving the article support member. The carriage includes a compartmented composite structure provided with a non-composite mounting interface and/or cooling interface With such an arrangement, conventional interfacing using, for example metal or ceramic materials, can be applied in combination with the advantages of composite structures, such as a low specific weight, a high Young's modulus at places and directions where required, high strength, high stability, and high electrical resistivity.

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Lierop, Netherlands

Martinus Arnoldus Henricus Terken