Motorola Corporation

Martin Walther

Herbert Goronkin

Raymond K Tsui

Saied N Tehrani

Ultra-small semiconductor devices and a method of fabrication including patterning the planar surface of a substrate to form a pattern edge (e.g. a mesa) and consecutively forming a plurality of layers of semiconductor material in overlying relationship to the pattern edge so that a discontinuity is produced in the layers and a first layer on one side of the pattern edge is aligned with and in electrical contact with a different layer on the other side of the pattern edge.

Ultra-small semiconductor devices having patterned edge planar surfaces

Ultra-small three terminal semiconductor devices and a method of fabrication including patterning the planar surface of a substrate and a control layer to form a first and second pattern edge and consecutively forming a plurality of layers of semiconductor material in overlying relationship to the pattern edges so that a discontinuity is produced in the layers and a first layer on one side of the pattern edge is aligned with and in electrical contact with a different layer on the other side of the pattern edge.

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Chandler, AZ, United States of America

Martin Walther