Carl Zeiss Smt Gmbh

Martin Wahle

Jens Kugler

Bernhard Geuppert

Stefan Hembacher

Martin Riedel

Marwène Nefzi

Burkhard Corves

Mathias Huesing

Michaela Schmid

Michael Lorenz

Tim Detert

An optical imaging arrangement includes an optical element unit, and an actuator device connected to the optical element unit and is configured to be connected to a support structure for supporting the optical unit. The actuator device is configured to: actively adjust, in an adjustment state, a position and/or an orientation of the optical unit with respect to the support structure in N degrees of freedom; and support the optical element unit in a statically overdetermined manner in at least one of the N degrees of freedom via a plurality of active first and second actuator components such that, in a holding state following the adjustment state, the first and second actuator components cause a parasitic residual load introduced into the optical element unit in the at least one of the N degrees of freedom.

Optical imaging arrangement with a piezoelectric device

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Munich, Germany

Martin Wahle