Huettinger Elektronik Gmbh & Co. Kg

Trumpf Huettinger Gmbh + Co. Kg

Ulvac, Inc.

Trumpf Huttinger Gmbh + Co. Kg

Hüttinger Elektronik Gmbh & Co. Kg

Martin Steuber

Peter Wiedemuth

Markus Bannwarth

Moritz Nitschke

Lothar Wolf

Sven Axenbeck

Thomas Kirchmeier

Christian Bock

Michael Glueck

Markus Winterhalter

Ekkehard Mann

Daniel Krausse

Michael Glück

Christian Fritsch

Rolf Merte

Ulrich Heller

Alfred Trusch

Krishna Kishore Nedunuri

Gerhard Zähringer

A method for producing an arc detection signal on the basis of a plurality of observation signals comprises producing an arc detection part-signal for each of at least two observation signals. Producing each of the part-signals includes correlating the respective observation signal with a correlation signal by influencing the correlation signal with the respective observation, thereby producing a correlation result; producing or modifying a coefficient on the basis of the correlation result; and weighting the respective observation signal with the coefficient. The arc detection part-signals are added to form the arc detection signal.

Method for producing an arc detection signal and arc detection arrangement

A full bridge that produces an alternating output signal can be driven by operating switching elements of the full bridge in each period in a switching sequence that determines the order of the activation and deactivation of the switching elements. The switching elements are switched in at least two different switching sequences, a first switching sequence is repeated n times before a second switching sequence is carried out, with n&#x3e;1, or the switching elements are switched in at least three different switching sequences.

Driving a full bridge circuit

An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.

Method and device for detecting arcs

New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the output signal or of an internal signal of the AC generator relating to the output signal. The methods also include comparing the reference value with a threshold value and detecting an arc when a predetermined result of the comparison is obtained.

Method of arc detection

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Buggingen, Germany

Martin Steuber