Trumpf Laser Gmbh

Trumpf Laser- Und Systemtechnik Gmbh

Martin Stambke

Nicolai Speker

Jan-Patrick Hermani

Thomas Notheis

Klemens Schmitt

Alexander Sauter

Patrick Ehrmann

A method for distance measurement includes: (a) measuring a focus distance between a z-focus position of a processing laser beam and a reference surface, and measuring a reference distance between a reference arm mirror of a coherence tomography apparatus and the reference surface using a measurement beam. The processing laser beam is directed onto the reference surface via a laser processing optical unit. The measurement beam is directed onto a same point of the reference surface as the processing beam or onto a point of the reference surface next to an impingement point of the processing beam. The method further includes (b) measuring a workpiece distance between the reference arm mirror and a workpiece surface using the measurement beam directed onto the workpiece surface, and (c) determining the distance between workpiece surface and the z-focus position based on the reference distance and the workpiece distance and the focus distance.

Method for distance measurement by means of OCT and associated computer program product

A method determines translational and/or rotational deviations between the measurement coordinate system of a measurement mirror scanner and the processing coordinate system of a processing mirror scanner. A measurement beam reflected at a workpiece returns on a path of an incident measurement beam and is captured by a spatially resolving measurement sensor to ascertain spatially resolving information of the workpiece. The reflected measurement beam, in a sensor image of the measurement sensor, is imaged onto a previously known image position. This is accomplished by ascertaining a focal position deviation of the processing beam by scanning with the processing beam, evaluating a laser power detected at grid points, fixing the processing mirror scanner, capturing spatially resolving height information of the pinhole diaphragm by the measurement sensor, and determining a translational deviation between the processing and measurement coordinate systems based on the deviation.

Method and computer program product for OCT measurement beam adjustment

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Dunningen, Germany

Martin Stambke