Heptagon Micro Optics Pte. Ltd.

Martin Schubert

Qichuan Yu

Tobias Senn

John A Vidallon

Han Nee Ng

Ramon Opeda, Jr

Attilio Ferrari

Hartmut Rudmann

Harmut Rudmann

The method regards manufacturing devices by replication, wherein each of the devices comprises a device surface. The method comprises producing the devices from a replication material by replication using a replication tool (), wherein the replication tool () comprises a tool material comprising replication sites () comprising a replication surface () each. Each of the replication surfaces () corresponds to a negative of the device surface of a respective one of the devices. The tool material comprises, in addition to the replication sites, one or more mitigating features () for reducing asymmetric form errors of the device surfaces. Replication tools () and methods for manufacturing these are also described.

Replication and related methods and devices, in particular for minimizing asymmetric form errors

The method for manufacturing a multitude of devices comprises: And it further comprises, after the conditioning: The treatment can comprise dimensionally changing the tool material by the exposure of the tool material to the conditioning material. Before carrying out the replication processes, the conditioning material can be hardened and removed.

Method for conditioning a replication tool and related method for manufacturing a multitude of devices

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Rüschlikon, Switzerland

Martin Schubert