Average Co-Inventor Count = 4.17
ph-index = 9
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl-zeiss-smt Ag (14 from 461 patents)
2. Carl Zeiss Smt Gmbh (4 from 1,405 patents)
3. Carl-zeiss-stiftung (2 from 702 patents)
20 patents:
1. 9494483 - Measuring system for measuring an imaging quality of an EUV lens
2. 8836929 - Device and method for the optical measurement of an optical system by using an immersion fluid
3. 8169595 - Optical apparatus and method for modifying the imaging behavior of such apparatus
4. 8120763 - Device and method for the optical measurement of an optical system by using an immersion fluid
5. 7570345 - Method of optimizing imaging performance
6. 7436521 - Optical measuring apparatus and operating method for imaging error correction in an optical imaging system
7. 7417745 - Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry
8. 7408652 - Device and method for the optical measurement of an optical system by using an immersion fluid
9. 7388696 - Diffuser, wavefront source, wavefront sensor and projection exposure apparatus
10. 7336371 - Apparatus and method for measuring the wavefront of an optical system
11. 7333216 - Apparatus for wavefront detection
12. 7286245 - Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser
13. 7233386 - Method of optimizing imaging performance
14. 7230220 - Method of determining optical properties and projection exposure system comprising a wavefront detection system
15. 7158237 - Interferometric measuring device and projection exposure installation comprising such measuring device