Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Martin Richter

Martin Wackerle

Sebastian Kibler

Juergen Kruckow

Yuecel Congar

Peter Woias

Christian Wald

Christoph Kutter

Henry Leistner

Stefan Kluge

Siegfried Roehl

Axel Wille

Klaus Heinrich

Markus Herz

Reinhard Linnemann

Robert Wieland

Waltraud Hell

Simone Strohmair

Rene Linssen

Christoph Jenke

Manuel Sutter

Yücel Congar

Julia Nissen

Lorenz Grünerbel

Agnes Bußmann

Siegfried Röhl

An embodiment is an electrostatic micro-pump including a diaphragm arrangement including a diaphragm and a first electrode structure. The electrostatic micro-pump further includes a valve arrangement, including an inlet check valve and an outlet check valve, wherein the diaphragm arrangement and the valve arrangement at least partially enclose a pump chamber. The electrostatic micro-pump further includes a second electrode structure arranged so as to form an electrostatic drive with the first electrode structure. The electrostatic drive is configured to deflect the diaphragm. The electrostatic micro-pump further includes at least one anti-stiction bump arranged between the first electrode structure and the second electrode structure, wherein in an inactive state of the micro-pump, a spacing between the first electrode structure and the second electrode structure varies towards a center region of the pump chamber when starting from a peripheral region of the pump chamber, wherein the peripheral region encloses the center region.

Electrostatic micro-pump and a process to produce an electrostatic micro-pump

A method for producing a micropump includes, among others, a step of providing a substrate, wherein the substrate includes at least one pump diaphragm for the micropump. Additionally, a diaphragm actuator for moving the pump diaphragm is provided, wherein the diaphragm actuator is arranged in an holding device. The holding device is aligned relative to the substrate such that the diaphragm actuator is arranged opposite to the pump diaphragm and the pump diaphragm is deflected in the direction of the diaphragm actuator by means of a fluid pressure that is higher than the ambient pressure. Additionally, the diaphragm actuator is mounted on the pump diaphragm.

Method for producing a micropump with mechanically biased diaphragm actuator

A method for manufacturing at least one micromechanical device includes: Further embodiments relate to a valve manufactured by means of the method and to a micromechanical pump.

Method for manufacturing a micromechanical device and micromechanical valve

According to an embodiment, a sensor arrangement comprises a first micropump, e.g. a microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, a second micropump, e.g. microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, and a sensor having a sensor chamber, e.g. a sensor cavity or sensor volume, with a sensor element, e.g. an active sensitive region or layer, in the sensor chamber, wherein the sensor is configured to provide a sensor output signal based on a condition of the fluid, e.g. a gas or liquid, in the sensor chamber. The sensor chamber of the sensor is fluidically coupled between the first and second micropump, and the first and second micropump are configured to provide a defined operation mode of the sensor arrangement based on the respective activation or operation condition of the first and second micropump for providing (1.) a defined negative fluid pressure in the sensor chamber, (2.) a defined positive fluid pressure in the sensor chamber or (3.) a defined fluid flow, e.g. fluid throughput, through the sensor chamber.

Sensor arrangement and method for sensing an amount or a concentration of a target fluid in a medium with the sensor arrangement

The invention relates to a combined pump-sensor arrangement having a substrate having a first main surface and an opposite second main surface. A package lid which defines a package having a measuring cavity is arranged on the first main surface of the substrate. Additionally, the pump-sensor arrangement has a micropump having a pump inlet and a pump outlet, the micropump being configured to suck in an analyte fluid present in the measuring cavity through the pump inlet and eject the same to an environment outside the measuring cavity via the pump outlet. Furthermore, the pump-sensor arrangement has a sensor for detecting at least one component of the analyte fluid present within the measuring cavity and movable by means of the micropump. In accordance with the invention, both the sensor and the micropump are commonly arranged on the first main surface of the substrate and within the measuring cavity.

Combined pump-sensor arrangement

A free jet dosage system serves for administering a fluid into an eye. The free jet dosage system includes a micropump having an inlet and an outlet, the micropump being configured to transfer the fluid from the inlet to the outlet and to dispense the fluid at the outlet to the eye as a free jet. The free jet dosage system further includes a sensor configured to sense the eye and to controller a control, and a micropump, wherein the controller is configured to activate the micropump as soon as the eye is sensed by the sensor.

Free jet dosage system for the eye

The invention relates to a pump having a piezo diaphragm transducer arranged at a pump body of the pump, and to a method for producing a pump, wherein a piezo diaphragm transducer is mounted to a pump body, wherein the method, among other things, has providing a piezoceramic layer. In accordance with the invention, at least one piezo element is diced from the piezoceramic layer so that the at least one piezo element has a regular polygon shape having at least six corners. In addition, the method has forming the piezo diaphragm transducer by mounting the piezo element to a pump diaphragm.

Pump comprising a polygon-shaped piezo diaphragm transducer

The invention relates to an apparatus having a pressure chamber and a micropump in fluid connection with the pressure chamber. The pressure chamber includes a gas-carrying region and a liquid-carrying region. The micropump is configured to generate a pneumatic pressure within the gas-carrying region that is lower than a fluid pressure of a liquid flowing through the liquid-carrying region. According to the invention, a gas-permeable and liquid-impermeable separating element separates, at least in sections, the gas-carrying region and the liquid-carrying region. According to the present invention, the micropump is disposed on the pressure chamber.

Degassing apparatus

The invention relates to a free-jet dosing system for dosing a free fluid jet to be dispensed. The free-jet dosing system includes, inter alia, a pump including an inlet and an outlet and configured to deliver fluid to be dispensed to the outlet. The free-jet dosing system further includes a dosage monitoring device arranged on the outlet side of the pump, the dosage monitoring device having an opening through which at least some of the fluid to be dispensed may pass, and the dosage monitoring device having a flow rate meter configured to determine the flow rate of the fluid which passes through the opening of the dosage monitoring device. In the inventive free-jet dosing system, the opening of the dosage monitoring device is configured as an outlet nozzle for ejecting the free fluid jet.

Free-jet dosing system

The invention relates to a device having an opening defining a fluid connection between a fluid channel in the device and ambient air, a sensor coupled to the fluid channel, configured to sense at least one component of the ambient air, and a micro fluid actuator connected downstream of the sensor, configured, in the suction stroke, to suck in fluid through the fluid channel and to transport the same towards the sensor, and, in the pressure stroke, to transport the sucked-in fluid through said fluid channel back towards the opening. According to the invention, the sensor is arranged spaced apart from the opening, and the volume of the fluid channel between the sensor and the opening is equal to or smaller than the stroke volume which the micro fluid actuator may convey with a single suction stroke.

Device having a micro fluid actuator

A free-jet dosing system for administering a fluid into or under the skin having a micropump and a nozzle arranged on the outlet side. The micropump has an inlet and an outlet and is configured to transport a fluid from the inlet to the outlet and to generate a blocking pressure of at least 20 bar at the outlet. The nozzle is configured to output the fluid output at the outlet as a free jet at a fluid pressure so that the fluid of the free jet may be injected into the skin.

Free-jet dosing system for applying a fluid into or under the skin

A controllable scent sample dispenser has a microdosing device for outputting, during an activation state, a scent sample at a scent sample outlet to the environment, wherein the microdosing device is placeable adjacent to an animal's nose so that a distance between the outlet of the microdosing device and a nare or nostril of the animal's nose is within a predefined range, and a microdosing driver unit for adjusting a dosing rate of the scent sample output at the scent sample outlet by selectively activating the microdosing device.

Controllable scent sample dispenser, and animal training and testing system for detecting scents

A fluid sample dispenser includes a microdosing device for outputting, during an activation state, a fluid sample at a fluid sample outlet to the environment, wherein the microdosing device is placeable adjacent to a person's nose so that a distance between the outlet of the microdosing device and a nostril of the person's nose is within a predefined range, and a microdosing driver unit for adjusting a dosing rate of the scent sample output at the scent sample outlet by selectively activating the microdosing device.

Controllable fluid sample dispenser and methods using the same

The invention relates to a method as well as a microdosing system for dosing an amount of fluid to be dispensed, wherein the microdosing system includes a micropump including an inlet and an outlet and configured to suck the fluid to be dispensed through the inlet and to dispense at least part of the fluid from the outlet. Further, the inventive microdosing system includes a first flow sensor arranged on the inlet side or the outlet side having an opening and a flow rate meter, wherein the flow rate meter is configured to determine the flow rate of the fluid passing through this opening. Additionally, the inventive microdosing system includes calibrators and/or fault detectors of the first flow sensor.

Microdosing system

A mobile device includes an opening defining a fluid connection between a fluid channel in the mobile device and ambient air, and a sensor arranged in the fluid channel, configured to sense at least one component of the ambient air. The mobile device further includes a micropump configured to draw in the ambient air through the opening and to convey the same to the sensor. According to the invention, the sensor is arranged spaced apart from the opening, and the volume of the fluid channel between the sensor and the opening is less than 200 microliters.

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Munich, Germany

Martin Richter