Robert Boschgmbh

Martin Putnik

Stefano Cardanobile

Robert Ramsperger

An electrode configuration for a microelectromechanical system, including a first electrode structure and a second electrode structure. The first electrode structure has a receptacle, and the second electrode structure has a finger. The first and second electrode structure are designed for a relative movement in relation to one another along a movement axis. A first width of the receptacle, perpendicular to the movement axis, tapers along the movement axis at least in a first region, and/or a second width of the finger, perpendicular to the movement axis, tapers along the movement axis at least in a second region.

Electrode arrangement for a micro-electro-mechanical system including tapered electrode structures

A rotation-rate sensor having a substrate, the rotation-rate sensor having a drive structure that is movable in relation to the substrate, the drive structure being attached to the substrate by a spring system, the spring system having a first spring component that connects the drive structure and the substrate, and a second spring component that connects the drive structure and the substrate, the first spring component and the second spring component being connected by an intermediate piece, wherein the intermediate piece includes a first edge bar and a second edge bar, a group of connecting bars being configured between the first and second edge bar, the connecting bars of the group of connecting bars each being disposed at an opening angle of between 1&#xb0; and 89&#xb0; on the first and/or second edge bar.

Rotation-rate sensor, method for manufacturing a rotation-rate sensor

A rotation rate sensor includes a substrate and a drive structure that is movable relative to the substrate and is fastened to the substrate via a spring system that includes first and second spring components that each connects the drive structure and the substrate and that are joined by an intermediate piece, the drive structure being joined to the intermediate piece via the first portion, and the intermediate piece or a center area, which is at least partially situated between the first and second portions, being joined to the substrate via the second portion, the first and/or second portions having a respective varying base area in a respective main extension direction of the first and second portions, respectively.

Rotation rate sensor and method for manufacturing a rotation rate sensor

A micromechanical spring structure, including a spring beam and a rigid micromechanical structure, the spring beam including a first end and an opposing second end along a main extension direction. The spring beam includes a fork having two support arms on at least one of the two ends, which is anchored to the rigid micromechanical structure, the two support arms being anchored to a surface of the rigid micromechanical structure, which extends perpendicular to the main extension direction of the spring beam.

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Reutlingen, Germany

Martin Putnik