Balluff Gmbh

Leica Microsystems Wetzlar Gmbh

Leica Microsystems Semiconductor Gmbh

Martin Osterfeld

Sorin Fericean

Lambert Danner

Albert Dorneich

Michael Veith

Andrea Hiller-Brod

Stephan Langer

Jochen Streib

Roland Schafer

Jorg Maier

Wolfgang Vollrath

Uwe Graf

Franz Cemic

Robert Mainberger

Frank Eisenkr&auml;mer

In a method for operating a system, which has a plurality of sensors (), the sensors () provide first sensor data () to a primary process (). Furthermore, the sensors () provide second sensor data (). At least a part of the first sensor data () and the second sensor data () is subjected to an analysis (). A result () of the analysis () is used in at least one secondary process () of the primary process ().

Method for operating a system

The at least one value is respectively determined from at least one measured value of the sensors (-) in a method for determining at least one physical value in a space () in which several sensors (-) are arranged which are set up to measurer the at least one value, for several positions () in the space () where there is no sensor (-). A system which is set up in order to determine the at least one physical value in the space () has several sensors (-) which are arranged in the space (). Furthermore, it has a database, in which information about the space () is stored, and a computer which is set up in order to determine the at least one value by means of the method.

Method and system for determining at least one physical value

The invention relates to a method for operating a distance sensor (). In the method, a transmission signal (S) is radiated as transmission radiation (S), reflected as reflection radiation (S) by an object (), the distance (D) of which is to be measured, and received as a reflection signal (S). The reflection signal (S) present at a receiver input () and a reference signal likewise occurring at the receiver input () are controlled to a specified ratio, the distance (D) being determined during the adjusting process. The invention further relates to devices for performing the method. The method is characterized in that microwaves are used as the transmission radiation (S) and a cross-talk signal (S, S) from the transmission signal (S) directly to the receiver input () with suppressed radiation of the transmission signal (S) is used as the reference signal.

Method for operating a distance sensor and device for performing the method

A method for operation of a distance sensor emits a transmission signal as transmission radiation, reflected by an object, the distance of which is to be measured, as reflection radiation, and received as a reflection signal. The reflection signal and a reference signal that occur at a receiver input are regulated to a predetermined ratio. The distance is determined during the regulation process. An auxiliary transmission antenna emits an auxiliary transmission signal as auxiliary measurement radiation, directly toward a reception antenna. Microwaves are used as the transmission and auxiliary transmission signals. The reception antenna receives the reflection radiation reflected by the object and passes it on to the receiver input as a reflection signal. The reception antenna receives the auxiliary measurement radiation directly and passes it on to the receiver input as an auxiliary reception signal which is evaluated as a reference signal when measurement radiation emission is suppressed.

Method for operating a distance sensor and device for carrying out the method

An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.

Autofocus module and method for a microscope-based system

An illumination device for a DUV microscope has an illumination beam path, proceeding from a DUV light source in which are arranged a condenser and a reflection filter system which generates a DUV wavelength band and comprises four reflection filters. At these, the illumination beam is reflected in each case at the same reflection angle &agr;, the illumination beam path extending coaxially in front of and behind the reflection filter system. According to the present invention, the reflection angle &agr;&equals;30&deg; and the DUV wavelength band &lgr; &plus;&Dgr;&lgr; has a half-value width of max. 20 nm and a peak with a maximum value S of more than 90% of the incoming light intensity. The resulting very narrow half-value width of the DUV wavelength band makes it possible for the DUV objectives of the DUV microscope to be very well-corrected.

Illumination device for a DUV microscope and DUV microscope

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Schlaitdorf, Germany

Martin Osterfeld