Siemens Aktiengesellschaft

Martin Nirschl

Matthias Schreiter

Janos Vörös

Thomas Huber

Dana Pitzer

Tomaso Zambelli

Kaori Sugihara

Janos Voeroes

Small and extremely small molecules and ions or atoms may be detected with the novel device with exceptional sensitivity. The detection is implemented in a simple manner by the known acoustic resonator FBAR or by means of other technologies that measure the physical properties of the filled layer. The permeability of substances (e.g. active ingredients) through membranes such as cell membranes, lipid bilayers, and cell walls can be examined by combining a sensor with the reservoir and the membrane.

Biochip sensor

A device for detecting at least one substance may include a resonator which, on its surface facing away from the carrier, is provided with a chemically sensitive layer for selectively binding a substance that is to be detected. An acoustic mirror is arranged between the carrier and the resonator. The acoustic mirror constitutes a band elimination filter having two closely adjacent notch frequencies, as a result of which the device is capable of oscillating in two resonant frequencies. The mass binding of the substance and the temperature can be determined computationally from the measured resonant frequencies.

Device and method for detecting at least one substance

A device for detecting at least one substance of a fluid, has a piezoacoustic thin film resonator with a piezoelectric layer on which electrode layers are arranged, and an adsorption surface for adsorbing the fluid substance, wherein the piezoelectric and electrode layers and the adsorption surface are designed and arranged on each other such that by electrically activating the electrode layers, an excitation alternating field can be coupled into the piezoelectric layer. The thin film resonator can be excited to a resonance oscillation frequency fwhich depends on an amount of the substance adsorbed on the adsorption surface because of an excitation alternating field coupled into the piezoelectric layer. An electrical insulating layer is arranged directly on a side of one of the electrode layers facing away from the piezoelectric layer. Particularly advantageous is the combination of an aluminum electrode layer and a silicon dioxide insulating layer.

Device and method for detecting a substance using a thin film resonator (FBAR) having an insulating layer

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Traunstein, Germany

Martin Nirschl