Vat Holding Ag

Other

Martin Netzer

Florian Ehrne

Andreas Hofer

Hanspeter Frehner

Marco Apolloni

Daniel Seitz

Martin Kienreich

Christof Bachmann

Harald Sonderegger

Eligio Belleri

Thomas L Swain

A valve on which a valve plate is arranged in a valve housing interior space of a valve housing and fixed to a shaft, in which the valve plate together with the shaft can be displaced back and forth in directions parallel to a shaft longitudinal axis between a closed position and an intermediate position, and by rotation of the shaft about the shaft longitudinal axis can be pivoted back and forth between the intermediate position and a maximum open position. A shaft leadthrough for sealing the shaft with respect to the valve housing has a bellows which can be expanded and pushed together in the directions parallel to the shaft longitudinal axis, a first bellows end of this bellows being fixed to the valve housing, and a shaft sealing ring in which the shaft is rotatably mounted, being arranged on a second bellows end.

Valve, in particular a vacuum valve

Disclosed is a regulating vacuum valve having a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.

Vacuum valve for providing a symmetrical fluid flow

A safeguarding device includes one or more positive-fit units that safeguard a wafer-transport-container opening element of a wafer transport container, which is held in its closure position by a closing mechanism. The closing mechanism includes one or more chambers, which includes a pressure connection channel that allows a variation of an inner pressure in the chamber relative to a reference pressure. A differential pressure is calculated from the inner pressure of the chamber and the reference pressure and influences a safeguarding status of the positive-fit unit.

Safeguarding device, wafer transport container with at least one safeguarding device, safeguarding system and method with the safeguarding device

A seal support ring () for a valve (), particularly a vacuum valve, which has a throughflow opening () and a basic body (), which annularly surrounds the throughflow opening, and a fastener arrangement () for fastening the seal support ring to a valve housing () of the valve. The basic body has a first side () on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring () made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall () is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side () of the basic body () opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

Seal support ring for a valve

The invention relates to a vacuum valve for the substantially gas-tight closure of an opening, comprising a closure element having a closure side and a coupling unit arranged on a rear side opposite the closure side, and a valve wall having valve seat surrounding the opening. The valve further comprises a linear drive unit enabling the closure element to be adjustable in at least two adjustment directions. The closure element is adjustable between an open position releasing the opening, an intermediate position pushed over the opening and a closed position closing the opening. The vacuum valve comprises a guide for the closure element associated with the opening. The closure element comprises a guide element interacting with the guide during an adjustment from the open position to the closed position and back.

Gate valve with sliding guide

A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Wafer transfer unit and wafer transfer system

A closure device () for an opening () in a chamber wall () is provided, wherein the closure device () has at least one closure element () and at least one closure element carrier body () and at least one yoke (). The closure element () is fixedly connected to the yoke () by the closure element carrier body (), wherein the yoke () is mounted in a housing () of the closure device () in such a way that the yoke can be slid by at least one cylinder-piston drive unit () of the closure device (), in particular parallel to a longitudinal extent () of the closure element carrier body (). The yoke () has at least one cylinder cavity () of the cylinder-piston drive unit () and/or at least one guide element receptacle () for guiding a guide element () of the closure device ().

Closure device mounted to a cylinder-piston drive unit displaceable yoke

A positioning device, in particular a wafer transportation container positioning device, for positioning a wafer transportation container in a loading and/or unloading position of a loading and/or unloading station which is configured at least for loading and/or unloading wafers from the wafer transportation container. The positioning device, in particular the wafer transportation container positioning device, comprises a positioning mechanism which is configured for contactless positioning of the wafer transportation container in a coupling process between the wafer transportation container and the loading and/or unloading station.

Positioning device, loading and/or unloading system and method for operating a positioning device

Vacuum valve having a valve housing with first and second valve openings, and a closure unit having first and second plates, a roller support arranged between the plates, multiple roller pairs, each formed from first and second spreading rollers, and a spring. The plates are carried together with the roller support when it moves parallel to a movement direction from the open position into an intermediate position, and an additional movement of the plates in the movement direction is blocked when the roller support moves from the intermediate position into a closed position, during which the spreading rollers move along rising flanks of recesses, and the plates are thus spread apart. Rotational axes of the spreading rollers of each roller pair are offset relative to each other and are spaced apart in the spreading direction by a distance smaller than a sum of the radiuses of the spreading rollers.

Vacuum valve

A vacuum valve is provided having a valve housing () which has a vacuum region () in the interior, a closure unit () which is arranged in the vacuum region () of the valve housing () and by which at least one valve opening () is closable in a closed state of the vacuum valve, a longitudinal drive () by which the closure unit () is adjustable in a longitudinal direction () for adjusting the closure unit () between a position opening up the valve opening () and a position covering the valve opening (). A longitudinal guide () for the displaceable guiding of the closure unit () parallel to the longitudinal direction () is provided, with this longitudinal guide having a guide rod () extending parallel to the longitudinal direction (), and at least one guide part (). At least one bearing element () of the guide part () is arranged in a region sealed off from the vacuum region () of the valve housing ().

A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (E), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (E), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where Eand Eenclose a defined angle (&#x3b1;), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

Vacuum valve for controlling a flow and for interrupting a flow path

A vacuum valve includes a valve housing () having a first housing part () and a second housing part (), between which a ring-shaped housing seal () is arranged, and a closure member () which is adjustable between an open position in which the vacuum valve is open and a closed position in which the vacuum valve is closed. The housing seal () is mounted on a ring-shaped carrier (). Additionally on the carrier () radially inside the housing seal () is mounted a ring-shaped seat seal () against which the closure member () is pressed with the closure member () in the closed position, wherein the seat seal () abuts against a sealing face of the valve housing ().

Growing community of inventors

Bludenz, Austria

Martin Netzer