Robert Boschgmbh

Martin Knapp

Werner Herden

Ning Qu

Wolfgang E Mueller

Johann Konrad

Erwin Naegele

Andreas Fischer

Joerg Gebers

Hans-Peter Fuessl

Hans-Peter Jahn

A sensor arrangement has a housing, a pressure detector having a measuring diaphragm which is deflectable by a pressurized measurement medium, a sensor circuit attached directly to the measuring diaphragm, an electronic evaluation circuit connected to the sensor circuit and formed as a hybrid circuit, a connector contacted by an element selected from the group consisting of the sensor circuit, the evaluation circuit and both, the hybrid circuit being fastened directly to the measuring diaphragm by a conductive glue which produces electrical connections between the hybrid circuit and the sensor circuit fastened to the measuring diaphragm and produces a ground connection to the housing.

Sensor arrangement with pressure detector and sensor circuit

A method for manufacturing chip stacks in which wafers are stacked one on top of the other. The wafer is provided with an adhesive foil on its bottom, and is subsequently cut into chips so that the adhesive foil remains intact and the chips adhering to the adhesive foil are stacked one on top of the other. A first layer of chips is reversibly attached to a baseplate, the adhesive foil is removed, the next layer of chips is attached to the bottom side of the chips already fastened to the baseplate, the adhesive foil is removed, and the last two steps are repeated until the desired number of chips is stacked one on top of the other.

Method of stacking chips with a removable connecting layer

Growing community of inventors

Kirchentellinsfurt, Germany

Martin Knapp