Steag Micro Tech Gmbh

Steag Microtech Gmbh Sternenfels

Martin Kallis

Karl Appich

Jakob Szekeresch

Torsten Gerisch

Eberhard Muhlfriedal

Eberhard Muhlfriedel

A device for coating substrates has a capillary slot which is used in a first step to apply lacquer to the substrate. In a second step, the lacquer layer thickness of the substrate is reduced and made more uniform by spinning in a spinning device.

Device for coating substrates in semiconductor production

A device for coating a plate has an open channel being open in an upward direction and a device for supplying a liquid to the open channel. The liquid in the open channel forms an convexly curved portion projecting upwardly from the open channel. A device for transporting a plate at a close distance past the open channel is provided, with which a surface to be coated of the plate facing the convexly curved portion of the liquid is guided such that a thin film of the liquid is deposited on the surface to be coated by adhesion effects. Another device for lacquering or coating plates or disks has a capillary slot that is filled with a liquid coating medium. The plate to be coated is advanced across the capillary slot with the surface to be coated facing downwardly so that due to the capillary effect a thin layer is deposited on the surface of the plate.

Capillary device for lacquering or coating plates or disks

Growing community of inventors

Muhlacker, Germany

Martin Kallis