View, Inc.

University of Illinois

Martin John Neumann

Robert T Rozbicki

Dhairya Shrivastava

Anshu A Pradhan

Sridhar Karthik Kailasam

Todd William Martin

Que Anh Song Nguyen

Trevor Frank

Disha Mehtani

Brian Edward Jurczyk

David N Ruzic

Darren Adam Alman

Jason Satern

Huatan Qiu

A method of sustained self-sputtering of lithium in a sputtering station having a lithium metal target, the method comprising initiating a lithium sputtering reaction in the sputtering station by igniting an initial plasma comprising a majority fraction of inert gas ions and inducing a sustained lithium self-sputtering reaction by reducing supply of an inert gas to the sputtering station under conditions that provide a sustained self-sputtering lithium plasma comprising a majority fraction of lithium ions.

Sustained self-sputtering of lithium for lithium physical vapor deposition

Described are methods of fabricating lithium sputter targets, lithium sputter targets, associated handling apparatus, and sputter methods including lithium targets. Various embodiments address adhesion of the lithium metal target to a support structure, avoiding and/or removing passivating coatings formed on the lithium target, uniformity of the lithium target as well as efficient cooling of lithium during sputtering. Target configurations used to compensate for non-uniformities in sputter plasma are described. Modular format lithium tiles and methods of fabrication are described. Rotary lithium sputter targets are also described.

Lithium sputter targets

A system for non-contact cleaning of particulate contamination of surfaces includes one or more sources that create a charge imbalance between a surface and particles that contaminate the surface, and a power supply that creates a pulsed electrical bias on the surface. This imbalance produces an electrostatic force that propels the particles off the surface. The cleaning process can be associated, for example, with microelectronic lithography and manufacturing.

Submicron particle removal

Growing community of inventors

Pekin, IL, United States of America

Martin John Neumann