Air Products and Chemicals, Inc.

Martin Jay Plishka

Eugene Joseph Karwacki, Jr

Andrew David Johnson

Dingjun Wu

John B Dickenson

Peter James Maroulis

Bing Ji

Steven Arthur Rogers

Mark Ian Sistern

Peter Richard Badowski

A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote chamber using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the organic electroluminescent residue from the surface.

Method for removing organic electroluminescent residues from a substrate

A process for the selective removal of a substance from a substrate for etching and/or cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a substance from a substrate comprising: providing the substrate having the substance deposited thereupon wherein the substance comprises a transition metal ternary compound, a transition metal quaternary compound, and combinations thereof; reacting the substance with a process gas comprising a fluorine-containing gas and optionally an additive gas to form a volatile product; and removing the volatile product from the substrate to thereby remove the substance from the substrate.

Removal of transition metal ternary and/or quaternary barrier materials from a substrate

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Apache Junction, AZ, United States of America

Martin Jay Plishka