Excelitas Technologies Gmbh & Co Kg

Excelitas Technologies Singapore Pte. Ltd.

Martin Hausner

Wilhelm Leneke

Marion Simon

Jürgen Schilz

Hermann Karagözoglu

Henrik Ernst

Guido Lauck

Fred Plotz

A method for the selective removal of material from a substrate surface for forming a deepening includes the steps of applying a mask onto the substrate surface in accordance with the desired selective removal and dry-etching the substrate, a metal, preferably aluminum, being used as the masking material. Power may be coupled inductively to a plasma.

Method for selectively removing material from the surface of a substrate, masking material for a wafer, and wafer with masking material

A sensor for detecting electromagnetic radiation comprises a sensor element, a housing in which the sensor element is disposed, and a radiation inlet window provided in the housing and closed by a material transmissible for the radiation to be detected. The transmissible material is fixed to the housing by fixation means not disposed in the field of view of the sensor element.

Sensor for detecting electromagnetic radiation

A sensor element for detecting electromagnetic radiation, particularly in the infrared range, comprises one or more heat-sensitive portions provided on a substrate and one or more influencing layers for influencing the absorption and/or reflection of the electromagnetic radiation to be detected. The heat-sensitive portion(s) and/or the influencing layers are arranged on the substrate in accordance with the thermal properties of the influencing layers, preferably asymmetrically.

Sensor element

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Wiesbaden, Germany

Martin Hausner