Oerlikon Trading Ag, Trubbach

Balzers Aktiengesellschaft

Oerlikon Surface Solutions Ag, Pfaffikon

Wieland-werke Ag

Oerlikon Trading Ag, Truebbach

Oc Oerlikon Balzers Ltd.

Oerlikon Surface Solutions Ag, Trubbach

Martin Grischke

Orlaw Massler

Christian Wohlrab

Mauro Pedrazzini

Hubert Eberle

Thorsten Michler

Michael Scharf

Martin Zaech

Markus Esselbach

Jürgen Becker

Astrid Gies

Thomas Jabs

The present invention relates to a coating for sliding parts that allows using diamond like carbon (DLC) or DLC-comprising coatings in combination with Molybdenum- and/or Zinc-comprising lubricants in such a manner that enhanced reduction of wear and friction in comparison to the state of the art is attained. The coating system according to the present invention comprises at least a metal-comprising carbon layer of the type Me-C/a)-C:X, whose element composition can be expressed as (MeC)Xwith 0.3&#x2266;a&#x2266;0.6 and 0&#x3c;b&#x2266;0.3, where Me is a metal or a combination of different metals and X is an element different from Me and different from C or X is a mixture of elements different from Me and which doesn't contain C. Me can be preferably Chromium (Cr) or Molybdenum (Mo) and X can be preferably hydrogen (H) or a mixture of silicon and hydrogen (Si+H).

Sliding component coated with metal-comprising carbon layer for improving wear and friction behavior by tribological applications under lubricated conditions

A vacuum treatment system () for treating workpieces has a treatment chamber () that can be evacuated and in which a low-volt arc-discharge device is placed, with at least one locking loading/unloading aperture and at least one coating source placed on one side wall of the treatment chamber. It also has a device for producing a magnetic field to create a remote magnetic field and at least one workpiece holder to hold workpieces. A target-shutter arrangement (') is designed so that when uncovered, the distance between the shutter () and the target () is less than 35 mm, thus allowing ignition and operation of a magnetron or cathode spark discharge behind the target, but preventing ignition of auxiliary plasma when the target () is turned off.

Vacuum treatment system

The invention relates to a conductive material consisting of an alloy that contains copper, for use as a plug-in or clip connection. Said material comprises a cover layer that is deposited on at least some sections of the contact surface, said layer consisting at least of a support layer and an adhesive layer. The anti-friction layer has a carbon content greater or less than 40 and less than or equal to 70 atomic percent.

Conductive material comprising an Me-DLC hard material coating

A process and an arrangement by means of which it is possible to generate a layer system for the protection against wear, for the protection against corrosion and for improving the sliding properties or the like, which has an adhesive layer for the arrangement on a substrate, a transition layer for the arrangement on the adhesive layer and a cover layer of an adamantine carbon, the adhesive layer including at least one element from the Group which contains the elements of the 4, 5and 6Subgroup and silicon, the transition layer comprising carbon and at least one element from the above-mentioned Group, and the cover layer consisting essentially adamantine carbon, the layer system having a hardness of at least 15 GPa, preferably at least 20 GPa, and an adhesion of at least 3 HF.

DLC coating system and process and apparatus for making coating system

The invention describes a device and a process that render possible the production of a layer system for wear protection, corrosion protection and improvement of the slipping properties and the like with an adhesion layer to be arranged on a substrate, a transition layer to be arranged on the adhesion layer and a covering layer of diamond-like carbon, wherein the adhesion layer comprises at least one element of the group of elements that contains the elements of the fourth, fifth and sixth subgroup of the periodic table and silicon, the transition layer comprises carbon and at least one element of the aforesaid groups and covering layer consists essentially of diamond-like carbon, the layer system having a hardness of at least 15 GPa, preferably at least 20 GPa, and an adhesion of at least 3 HF according to VDI 382l, Sheet The process used for the production of this layer system is such at the initial introduction of the substrate into a vacuum chamber and pumping to produce a vacuum of at least 10mbar, preferably 10mbar, is at first followed by the cleaning of the substrate surface to remove any adhering impurities and then by the plasma-supported deposition of the adhesion layer. Subsequently the transition layer is applied by the simultaneous deposition of the components of the adhesion layer and the deposition of carbon from the gaseous phase by means of plasma-CVD. The diamond-like carbon layer is then applied solely by means of plasma-supported deposition of carbon from the gaseous phase. During the process a biasing voltage is applied to the substrate, this voltage being pulsed in the medium-frequency range, while a superposed magnetic field stabilizes the plasma in the individual process steps. An appropriate device for carrying out the coating process therefore consists of a vacuum chamber () with a pumping system () for the production of a vacuum in the vacuum chamber, substrate holding devices () to receive the substrates to be coated, at least one gas supply unit () for dosing the supply of process gas, at least one vaporizer device () to make available coating material for deposition, an arc generation device () to ignite a low-voltage d.c. arc, a device () for the generation of a substrate biasing voltage and with at least one or several magnetic field generator devices () for the formation of a far magnetic field. The invention also describes a DLC-slipping layer system and a process for the production of such a system, which on its surface side is provided with an an additional slipping layer.

DLC layer system and method for producing said layer system

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Martin Grischke