Xmems Labs, Inc.

Martin George Lim

Jemm Yue Liang

Chiung C Lo

Wen-Chien Chen

David Hong

Michael David Housholder

Chun-I Chang

Hsien-Ken Liao

Lei Chen

JengYaw Jiang

Hai-Hung Wen

Kuan-Ju Tseng

Jengyaw Jiang

A manufacturing method for a device includes: providing a wafer including a first layer and a second layer; forming and patterning an actuating material formed on the wafer; patterning the first layer of the wafer to form a trench line; and removing a first part of the second layer. The first layer forms a film structure including a membrane. A slit is formed within and penetrates through the membrane because of the trench line. The film structure is actuated to form a vent temporarily because of the slit. An ear canal and an ambient of a wearable sound device are to be connected via the vent temporarily opened. The slit divides the membrane into a first membrane portion and a second membrane portion. A difference between the displacements of these two membrane portions is larger than a thickness of the membrane when the vent is formed.

Manufacturing method of device

A venting device includes an anchor structure and a membrane. The membrane is anchored on the anchor structure and configured to form a first vent and a second vent. The membrane includes a first flap, a second flap and a third flap. The membrane partitions a space into a first volume and a second volume, and the first volume and the second volume are connected when the first vent and the second vent are formed. The first flap is actuated to move toward a first direction and the second flap is actuated to move toward a second direction opposite to the first direction, so as to form the first vent. The first flap is actuated to move toward the first direction and the third flap is actuated to move toward the second direction opposite to the first direction, so as to form the second vent.

Venting device, manufacturing method of venting device, venting method and device

A venting device is disposed within a wearable sound device or to be disposed within the wearable sound device. The venting device includes an anchor structure, a film structure and an actuator. The film structure includes an anchor end anchored on the anchor structure and a free end, and the film structure is configured to form a vent or close the vent. The actuator is disposed on the film structure. The film structure partitions a space into a first volume and a second volume, and the first volume and the second volume are connected via the vent when the vent is formed. The venting device is controlled by the controller to seal the vent when the controller determines to close the vent.

Venting device

A package structure includes a first substrate and a first device disposed on the first substrate. The first device includes at least one anchor structure, a film structure anchored by the anchor structure and an actuator configured to control the film structure to form a first vent temporarily. The film structure partitions a space into a first volume to be connected to an ear canal and a second volume connected to an ambient of a wearable sound device. The ear canal and the ambient are connected via the first vent when the first vent is opened. The first vent is opened by controlling a first membrane portion and a second membrane portion of the film structure, such that a difference between a first displacement of the first membrane portion and a second displacement of the second membrane portion is larger than a thickness of the film structure.

Device, package structure and manufacturing method of device

A sound producing package structure includes a shell and a chip. The shell includes a top structure, a bottom structure and a sidewall structure. The chip is disposed inside the shell and configured to produce an acoustic wave, wherein the chip includes a thin film structure and an actuator configured to actuate the thin film structure, and the thin film structure is substantially parallel to the top structure and the bottom structure. A first opening is formed on the sidewall structure, and the acoustic wave propagates outwards through the first opening.

Sound producing package structure and manufacturing method thereof

A sound producing device is provided. The sound producing device comprises a substrate; and a membrane pair, disposed on the substrate, comprising a first membrane and a second membrane; wherein when a driving voltage is applied on the membrane pair, the first membrane and the second membrane deform toward each other, such that air between the first membrane and the second membrane is squeezed outward and an air pulse is generated toward a direction away from the substrate.

Sound producing device

An acoustic transducer is configured to perform an acoustic transformation. The acoustic transducer is disposed within a wearable sound device or to be disposed within the wearable sound device. The acoustic transducer includes at least one anchor structure, a film structure and an actuator. The film structure is disposed within a first layer and anchored by the anchor structure disposed within a second layer. The actuator is disposed on the film structure, and the actuator is configured to actuate the film structure to form a vent temporarily. The film structure partitions a space into a first volume to be connected to an ear canal of a wearable sound device user and a second volume to be connected to an ambient of the wearable sound device. The ear canal and the ambient are to be connected via the vent temporarily opened when the film structure is actuated.

Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer

An acoustic transducer is disposed within a wearable sound device or to be disposed within the wearable sound device. The acoustic transducer includes a first anchor structure and a first flap. The first flap includes a first end and a second end. The first end is anchored by the first anchor structure, and the second end is configured to perform a first up-and-down movement to form a vent temporarily. The first flap partitions a space into a first volume to be connected to an ear canal and a second volume to be connected to an ambient of the wearable sound device. The ear canal and the ambient are connected via the vent temporarily opened.

A package structure includes a housing and a sound producing chip. The sound producing chip is disposed within the housing. The sound producing chip includes a membrane and an actuator. The membrane includes a coupling plate and a spring structure connected to the coupling plate. The actuator is configured to receive a driving signal to actuate the membrane. The spring structure is situated between the coupling plate and the actuator. The coupling plate is actuated to move by the actuator via the spring structure.

Package structure and methods of manufacturing sound producing chip, forming package structure and forming sound producing apparatus

A sound producing device includes at least one air pulse generating element. Each of the at least one air pulse generating element includes a membrane, a first air chamber and at least one opening, wherein a chamber pressure exists in the first air chamber, and the opening is connected between the first air chamber and an ambient surrounding the sound producing device. The membrane is actuated to change the chamber pressure of the first air chamber to generate a plurality of air pulses, the air pulses are propagated through the at least one opening, the air pulses produce a non-zero offset in terms of sound pressure level, and the non-zero offset is a deviation from a pressure value of an ambient pressure outside the sound producing device.

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Hillsborough, CA, United States of America

Martin George Lim