Xerox Corporation

Martin G Lim

Babur B Hadimioglu

Calvin F Quate

Scott Alan Elrod

Richard G Stearns

Donald Leonard Smith

Eric G Rawson

James C Mikkelsen

A method of fabrication is provided for multi-step microlithographic structures including Fresnel lenses whereby the process includes the formation of intermediate etch stop layers that are embedded with the structure material. This is accomplished in one aspect of the invention by depositing Fresnel lens material using known techniques and the selectively altering the chemistry of the material being deposited to form the intermediate etch stop layers at suitable positions without interrupting the deposition process. In another aspect, etch stop layers are patterned on layers of the lens material and embedded between such layers. The structure, or lens, is then formed using masking, patterning and etching techniques.

Method for fabrication of multi-step structures using embedded etch stop layers

An acoustic ink printhead includes a substrate having an inlet side, an outlet side, and a plurality of acoustic lenses acoustically coupled to a substrate. Each acoustic lens has an identical focal length for focusing acoustic energy at an associated position adjacent to the substrate. A top plate is attached to the substrate to define a channel that permits ink flow between the inlet side and the outlet side. The top plate has a plurality of variable size openings to permit ejection of acoustically impelled droplets of ink flowing in the channel. Because of the varying size of the openings in the top plate, the ink menisci in the plurality of openings is maintained at a substantially constant distance with respect to the substrate, improving uniformity of droplets ejected.

Acoustic ink printhead with variable size droplet ejection openings

Acoustic printheads having an optically transparent substrate, at least two optical lenses, which may be part of the substrate, and a first structure, which may also be part of the substrate. The optical lenses focus light which irradiates the substrate into optical focal points at known locations relative to the first structure. The first structure may be part of an acoustic droplet ejector which includes an acoustic lens that is fabricated on the optically transparent substrate. The optical focal points can be used to precisely align the first structure with another structure.

Acoustic printheads with optical alignment

A material deposition head having lithographically defined ejector units. Beneficially, each ejector unit includes a plurality of lithographically defined droplet ejectors. Furthermore, methods of fabricating such lithographically defined material deposition heads are also described.

Lithographically defined ejection units

A device for moving an object, such as a sheet of paper or other substrate, includes a base element, a drive mechanism to move the base element in first and second directions, such as by vibration, and a plurality of flexible ratchets fixedly secured to the base element. As the base element vibrates, the ratchets advance the sheet of paper in a direction perpendicular to the direction of vibration of the base element. Pluralities of base elements and drive mechanisms can be provided to direct movement of the substrate in various directions.

Apparatus and method for moving a substrate

Droplet ejectors having a plurality of droplet ejecting ports capable of ejecting ink droplets onto a recording medium and having a capping structure that alleviate debris contamination. The capping structure includes a plurality of openings, some of which allow ejected droplets to pass onto the recording medium. The capping structure is removably spaced above the remainder of the droplet ejector using spacers which mate with others openings in the capping structure.

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Union City, CA, United States of America

Martin G Lim