Manz Ag

Aixtron Se

Martin Freundt

Walter Franken

Benjamin Schmieder

Ralf Neher

A conveying system including at least three axis devices for transporting component receiving portions for receiving a component and/or a component holder on a station path along a main transport direction in a component station. The axis devices each have a carriage assembly having one of the component receiving portions and having a feed apparatus for feeding the component receiving portion from an avoidance state to a transport position, and each have a linear shaft apparatus for moving the component receiving portion in the transport position along the station path in the main transport direction and for returning the component receiving portion in the avoidance state in a reverse direction. At least two of the axis devices are linear displacement axis devices which linearly move the component receiving portion in a spatial direction of the feed apparatus. The spatial directions each define a different projection direction in a projection plane perpendicular to the main transport direction.

Conveyor with linear axis devices

A positioning unit includes two control carriages and a work carriage, it being possible to move the two control carriages and the work carriage on tracks that extend in parallel with one another. There is a working arm being articulated on a work base point on the work carriage and a control arm being articulated on a control base point on each of the control carriages. The control arms are articulated on the working arm at a control point of the working arm, the control point being spaced apart at a predefined lambda distance (d) from an end of the working arm that forms a working-point end and faces away from the work base point, and the two control base points and the work base point defining a triangle. At least two carriages of the two control carriages and the work carriage are movably arranged on a shared guide.

Positioning unit

A pressing system for a laser joining system for pressing together parts to be joined (storage cell, base plate) in the area of a joining point, includes a receptacle for accommodating the parts to be joined, a pressing element for locally pressing together the parts to be joined, in the area of the joining point, and a positioning system for the relative positioning of the pressing element and the receptacle and for pressing together the parts to be joined, during the joining process. The positioning system includes a parallel positioning device for the relative positioning of the receptacle and the pressing element in parallel to a plane (E), and an oblique positioning device for the relative positioning of the pressing element and the receptacle obliquely, in particular transversely, with respect to the plane (E) and for pressing together the parts to be joined, during the joining process.

Pressing system, laser-joining system, and method

A transport module for loading and unloading a process module of a semiconductor production device includes a housing, which has a chamber that can be evacuated. The chamber has an opening that can be closed in a gas-tight manner by a closure device, which opens out into a first coupling duct associated with the transport module. The first coupling duct is connected with a flange plate using an elastic intermediate element, wherein the flange plate can be seated in a plane parallel, sealing manner on a flange plate of a second coupling duct associated with the process module. After opening the closure device, an evacuated loading and unloading duct to the process module is created. An inner and outer mounting section of the intermediate element is spaced apart from one another in the radial direction, with respect to the axis of the first coupling duct, by a deformation zone.

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Esslingen, Germany

Martin Freundt