Other

Martin F&uuml;rfanger

Georg Brenninger

Per-Ove Hansson

Wolfgang Sedlmeier

A method and device for detecting an incorrect position of a semiconductor wafer during a high-temperature treatment of the semiconductor water in a quartz chamber which is heated by IR radiators, has the semiconductor wafer lying on a rotating support and being held at a specific temperature with the aid of a control system. Thermal radiation which is emitted by the semiconductor wafer and the IR radiators is recorded using a pyrometer. The radiation temperature of the recorded thermal radiation is determined. The semiconductor wafer is assumed to be in an incorrect position if the temperature of the recorded thermal radiation fluctuates to such an extent over the course of time that the fluctuation width lies outside a fluctuation range &Dgr;T which is regarded as permissible.

Growing community of inventors

Steinhöring, Germany

Martin Fürfanger

Growing community of inventors

Steinhöring, Germany

Martin F&uuml;rfanger

Martin Fürfanger