Robert Boschgmbh

Martin Eckardt

Ando Feyh

Po-Jui Chen

Axel Franke

Ingo Herrmann

Christopher Holzknecht

Simon Rentschler

Markus Linck-Lescanne

Frank Freund

Daniel Herrmann

Marc Brueck

Christian Schuppler

Martin Schaaf

Thomas Brummel

Karsten Storbeck

Milan Kotynek

Andreas Bigge

Annette Hanselmann

Martin Heyer

Thomas Kraus

Ulrich Arneth

Thomas Pastuszka-Lude

Tobias Rentrop

Vojtech Rubas

Po- Jui Chen

Gas sensors are provided that are fashioned such that there is an increased flow over the sensor element. In this way, a good measurement dynamic is achieved even when these gas sensors are exposed to exhaust gases having a low flow speed.

Gas sensor

A method for detecting particles, for example in an exhaust gas stream of a vehicle in which the exhaust gas stream is guided along a duct, includes using a particle sensor that has at least two electrodes arranged in the duct. The method includes applying a first voltage and a second voltage to the electrodes to produce a first electric field and a second electric field between the electrodes. The method also includes ascertaining a first capacitance value corresponding to the first electric field and a second capacitance value corresponding to the second electric field of a capacitor formed by the electrodes. Information relating to the particles contained in the exhaust gas stream is ascertained from the first capacitance value and the second capacitance value.

Method and particle sensor for detecting particles in an exhaust gas stream

A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area. A surface of the cavern which is covered by the dielectric membrane is greater than or equal to 50% and less than or equal to 100% of the possible coverable surface. An edge of the reference element which faces the dielectric membrane has greater than or equal to 50% and less than or equal to 100% of its extent contacted by the dielectric membrane. Sections of the side walls of the cavern which face the dielectric membrane have greater than or equal to 50% and less than or equal to 100% of the possible size contacted by the dielectric membrane.

Thermally decoupled micro-structured reference element for sensors

A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.

Micro electrical mechanical magnetic field sensor utilizing modified inertial elements

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Stuttgart, Germany

Martin Eckardt