Rohde and Schwarz Gmbh & Co. Kg

Credence Systems Corporation

Martin Breinbauer

Florian Ramian

Michael Simon

Darren Tipton

Steffen Chladek

Embodiments of the present disclosure relate to methods of finding optimized analog measurement hardware settings of a measurement system for a target measurement. The method can include one or more of the following steps: applying initial settings to the measurement system; varying the settings over a power sweep while processing a test signal used for the target measurement or a representative signal; performing the target measurement during the power sweep, thereby determining a hardware contribution of the measurement system over the power sweep; and identifying the respective settings that lead to a minimum hardware contribution of the measurement system at various powers.

Method of finding optimized analog measurement hardware settings as well as method of measuring a device under test

A method and apparatus for radio frequency vector calibration of s-parameter measurements to the tips of the wafer probe needles of an automatic test equipment production tester. The method involves a modified Line-Reflect-Line (LRL) calibration routine that uses a Thru-Reflect-Line to LRL shift to eliminate the need for a precisely characterized reflect standard used during a conventional LRL calibration. The method further involves de-embedding the non-ideal effects of the non-zero length thru standard used during the calibration routine to improve measurement accuracy of the tester. The apparatus may involve the use of RF relays to allow multiple wafer probe needles to share RF test ports.

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Munich, Germany

Martin Breinbauer