Leybold Systems Gmbh

Balzers Und Leybold Deutschland Holding Ag

Unaxis Deutschland Holding Gmbh

Martin B&auml;hr

Erik Laux

Rolf Adam

J&ouml;rg Krempel-Hesse

A method is disclosed for the operation of a high-power electron beam for the vaporization of materials in a target. With this method, static and dynamic deflection errors are corrected. First, the static and dynamic deflection errors are ascertained by means of a teach-in process for concrete spatial coordinates and concrete frequencies of the deflection currents and stored in a memory. For the later operation, this stored data is used in such a way that input geometric data for the incidence points of the electron beam is automatically recalculated into corrected current values which bring about the exact incidence onto the input points. A corresponding procedure takes place with the input of frequencies for the deflection current. The input frequencies are automatically corrected in terms of frequency and amplitude in order to eliminate the frequency-dependent attenuation effects. Both in the correction of the static and in the correction of the dynamic deflection errors it is guaranteed by suitable interpolation methods that even the spatial coordinates and frequencies not considered in the teach-in process are taken into account. Finally, a method is specified with which it is possible by mere specification of a power distribution on a crucible surface to control the electron beam such that the specified data is satisfied.

Method for the operation of an electron beam

A sputtering cathode with a flat plate-shaped target (,) and a tub-shaped yoke (,) arranged behind the target (,), with center ridge (,) and with magnets (,) for generating an enclosed tunnel of arc-shaped curved field lines (,) in front of the target surface, as well as with three sheet metal cutouts (,) or groups of partial cutouts inserted into the plane between the target (,) and the end faces (,) of the tub rim of the yoke (,) facing the target (,), all the sheet metal cutouts (,) together form two gaps (a,b) extending roughly parallel to the end faces (,), wherein the magnets (,) are each incorporated or inserted into the yoke bottom and the side surfaces of the magnets (,) facing towards and away from the target (,) run flush with the yoke bottom.

Growing community of inventors

Haundorf-Gräfensteinberg, Germany

Martin Bähr

Growing community of inventors

Haundorf-Gräfensteinberg, Germany

Martin B&auml;hr

Martin Bähr