Leybold Systems Gmbh

Leybold Durferrit Gmbh

Martin Bahr

Volker Bauer

Matthias Blum

Friedrich Anderle

Rolf Adam

Helmut Eberhardt

Alfred Rick

Josef Heimerl

In a sputter cathode with a plate-shaped target (8) and with a trough-shaped yoke (3), arranged behind the target (8), with middle web (5) and with magnets (7, 7', . . . ) for producing a closed tunnel of field lines (15, 15', . . . ) curved in an arc in front of the target surface as well as with three sheet-metal blanks (9, 10, 11) consisting of one layer of a compound plate e.g. of an aluminum/iron compound plate, which blanks are placed into the plane between the target (8) and the front surfaces (12, 13) of the trough edge of the yoke (3), which front surfaces face the target (8), all sheet-metal blanks (9, 10, 11) of magnetically conductive material together form gaps (a, a') extending approximately parallel to the front surfaces (12, 13), which gaps (a, a') are filled out between the sheet-metal blanks (9, 10, 11) by the other layer (21) of the compound plate.

Sputter cathode

A vacuum coating device coats substrates on all sides by rotating the substrates in a material flow. The device is for use in a vacuum chamber with a material source, and includes a holder for holding the substrates opposite the material source and drives correlated with the holder to bring about a rotation and shifting movement of the substrates. The device includes a hollow manipulator arm formed from three legs which extend at an angle with respect to one another. More specifically, the first leg extends at an obtuse angle with respect to the second leg, and the second leg extends at an approximately right-angle with respect to the third leg. The substrates are then held at the end of the third leg by the holder. The manipulator arm, when driven by a motor, can rotate around the longitudinal axis of the first leg, and, moreover, can move back and forth in the direction of this longitudinal axis. The holder includes a planetary gear system and substrate holders, which are made to rotate by the planetary gear system.

Vacuum coating device for coating substrates on all sides

A magnetic deflection system for a high-power electron beam with an expanding cross-section area is used for melting or vaporizing metallic materials. Saddle coils are provided which open in a direction of expansion of the electron beam. With the aid of these saddle coils large deflection speeds of the electron beam are obtained with small imaging errors and large deflection angles.

Magnetic deflection system for a high-power electron beam

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Nidderau, Germany

Martin Bahr