Fabmatics Gmbh

Martin Bachlechner

Martin Peiter

Cornelius Günther

Nadja Erler-Lohse

A purge measuring system for front opening unified pods ('FOUPs') which are positioned in a FOUP nest. Along with at least one unoccupied/occupied sensor for the FOUP nest, at least one gas feed line and one gas discharge line for feeding and discharging flushing gas respectively is provided. At least one pressure sensor, a flowmeter and a regulator valve are arranged in each gas feed line. The valve is regulated based on the measuring results of pressure sensor and flowmeter. At least one moisture sensor and/or one oxygen sensor are arranged in each gas discharge line.

FOUP measurement chamber

The subject matter of this invention is a device for flexible purge management, comprising a FOUP transport system, a purging gas distribution system, one or more FOUP nests for holding FOUPs and an electronic control system. The overhead FOUP transport system, the gas distribution system and the electrical system run together for the most part. Adapter plates that serve to hold the FOUPs are arranged in the FOUP nests. A computer-supported multi-tier control system controls the device and makes it possible to individually address each FOUP nest and to also operate the remaining FOUP nests when there is partial removal.

Growing community of inventors

Dresden, Germany

Martin Bachlechner