Massachusetts Institute of Technology

Input/output, Inc.

Gm Global Technolgoy Operations, Inc.

Robert Boschgmbh

Axsun Technologies, Inc.

Mass. Inst. of Tech.

Bioscale, Inc.

Martin Arnold Schmidt

Klavs F Jensen

Vladimir Bulovic

Stephen D Senturia

Jianglong Chen

Howard D Goldberg

Jeffrey Hastings Lang

Duli Yu

Roger T Howe

Marc A Baldo

Aleksander Franz

Martin F Schlecht

Valerie Gassend

Matthew W Ip

Arjun Selvakumar

James L Marsh

Philip Simon

Axel Guenther

Bing-Fai Fung

Michael A Huff

Moungi G Bawendi

Michael Francis Miller

Alan H Epstein

Su-Chee Simon Wang

Lianzhong Yu

Samuel Benjamin Schaevitz

Michael Mettner

Stuart A Jacobson

Steven F Nagle

Kenneth S Breuer

Samara Firebaugh

Fredric F Ehrich

Ian A Waitz

Mark S Spearing

Vincent M McNeil

Theresa Lober

Brian Yen

Leonel R Arana

G K Ananthasuresh

Dale C Flanders

Mehmet Toner

Conor Francis Madigan

Todd A Thorsen

Brett P Masters

Akintunde Ibitayo Akinwande

Luis Fernando Velásquez-García

Murali V Chaparala

Martin Zdenek Bazant

Joel Voldman

Jeremy A Levitan

Mark Lundstrom

Mehran Mehregany

Martha L Gray

Alok Srivastava

Joseph H Haritonidis

Lee S Tavrow

Carol Livermore-Clifford

Parker Andrew Gould

Markus I Flik

Robert P Ried

Manish Jhunjhunwala

Christopher A Bang

Zhoumin Zhang

Kay Y Ng

Mitchell David Hsing

Aalap S Dighe

Eric Wing-Jing Lam

Ed Crawley

Matthew W Losey

Valerie Leblanc

Rebecca Braff

Valerie LeBlanc

A substrate processing system that is optimized for the production of smaller volumes of semiconductor components is disclosed. To minimize cost, the substrate processing system is designed to accommodate smaller substrates, such as substrates having a diameter of roughly one inch. Additionally, the components of the substrate processing system are designed to be interchangeable, thereby further reducing cost and complexity. In certain embodiments, the substrate processing system comprises a lower assembly, which may be used with one or more upper assemblies. The lower assembly is used to support the substrate and provide many of the fluid, electrical, and sensor connections, while the upper assemblies include the apparatus required to perform a certain fabrication function. For example, different upper assemblies may exist for deposition, etching, sputtering and ion implantation.

Processing system for small substrates

A microvalve device is provided that includes a through via located in an island structure supported on a thermally-insulating membrane supported by a frame. The through via is surrounded by a meltable sealing material. A heater element is positioned on the island structure for sealing the material over the through via by heating the sealing material.

Single-use, permanently-sealable microvalve

In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores, the micro-pores providing a conduit for passage of the suspended organic particles; and a nozzle heater for pulsatingly heating the micro-pores nozzle to discharge the suspended organic particles from the discharge nozzle.

Method and apparatus for depositing LED organic film

The disclosure relates to providing printed structures of polymer that have substantially flat printed surfaces. In one embodiment, the disclosure relates to a post-printing treatment apparatus for receiving a substrate supporting a polymer printing thereon. The polymer can be PMMA or other suitable polymer. In a related embodiment, the polymer defines a thermoplastic polymer having a glass transition temperature. The apparatus can comprise of a chamber, and input manifold, an exhaust manifold, a solvent reservoir and a gas reservoir. The solvent reservoir provides one or more solvent systems adapted to chemically bind, and potentially react, with the polymer. The gas reservoir provides one or more gases for drying the substrate and printed polymer after the solvent treatment step. In one application, a substrate having printed surface thereon is placed in the chamber and exposed to the solvent system for sufficient period of time to provide substantially flat print surfaces.

Method and apparatus for forming structures of polymer nanobeads

The disclosure relates to a method for depositing an organic film layer on a substrate. In one implementation a method to deposit organic film by generating vaporized organic particles; streaming a carrier fluid proximal to a source to carry the vaporized organic particles and solid organic particles from the source towards the substrate; transporting the vaporized and solid organic particles through a discharge nozzle with a plurality of micro-pore openings, placed between the source and the substrate, that permits the passage of at least a portion of the vaporized or solid organic particles through the micro-pores; depositing the vaporized organic particles and the solid organic particles that are transported through the discharge nozzle onto the substrate.

The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.

Method and apparatus for controlling film deposition

A population of nanocrystals having a narrow and controllable size distribution and can be prepared by a segmented-flow method.

Flow method and reactor for manufacturing nanocrystals

A method of separating a first fluid from a second fluid may include prewetting with the first fluid at least one channel defined by a separation device, the at least one channel thereby containing a column of the first fluid along its length. A combined flow of the first fluid and the second fluid may be presented to the separation device, so that the at least one channel is in fluid communication with the combined flow. Fluid pressure may be applied across the combined flow and the separation device, but the applied pressure should not exceed the capillary pressure in the at least one channel. Otherwise, the combined flow may be forced through the separation device. In this manner, the first fluid flows through the at least one channel, and the second fluid is excluded from the at least one channel, thereby separating at least a portion of the first fluid from the second fluid.

Fluid separation

This invention provides devices and apparatuses comprising the same, for the mixing and pumping of relatively small volumes of fluid. Such devices utilize nonlinear electrokinetics as a primary mechanism for driving fluid flow. Methods of cellular analysis and high-throughput, multi-step product formation using, devices of this invention are described.

Microfluidic pumps and mixers driven by induced-charge electro-osmosis

Flow method and reactor for manufacturing noncrystals

An accelerometer () for measuring seismic data. The accelerometer () includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer () also includes a top cap press frame recess () and a bottom cap press frame recess () for isolating bonding pressures to specified regions of the accelerometer (). The accelerometer () is vacuum-sealed and includes a balanced metal pattern () to prevent degradation of the performance of the accelerometer (). A dicing process is performed on the accelerometer () to isolate the electrical leads of the accelerometer (). The accelerometer () further includes overshock protection bumpers () and patterned metal electrodes to reduce stiction during the operation of the accelerometer ().

Sensor design and process

A micromachined device for efficient thermal processing at least one fluid stream includes at least one fluid conducting tube having at least a region with wall thickness of less than 50 &#x3bc;m. The device optionally includes one or more thermally conductive structures in thermal communication with first and second thermally insulating portions of the fluid conducting tube. The device also may include a thermally conductive region, and at least a portion of the fluid conducting tube is disposed within the region. A plurality of structures may be provided projecting from a wall of the fluid conducting tube into an inner volume of the tube. The structures enhance thermal conduction between a fluid within the tube and a wall of the tube. A method for fabricating, from a substrate, a micromachined device for processing a fluid stream allows the selective removal of portions of the substrate to provide desired structures integrated within the device. As an example, the micromachined device may be adapted to efficiently react fluid reactants to produce fuel for a fuel cell associated with the device, resulting in a system capable of conversion of chemical to electrical energy.

Thermally efficient micromachined device

The disclosed sensor chip includes a substrate and a moving member coupled to the substrate and disposed for movement relative to the substrate. The moving member moves relative to the substrate in a first direction and in a second direction in response to movement of the substrate. The first direction is different than the second direction. The moving member includes a plurality of receptors. The receptors are configured for selectively binding to a first measurand.

Resonant sensor and sensing system

Growing community of inventors

Reading, MA, United States of America

Martin Arnold Schmidt