Applied Materials, Inc.

Semilev Gmbh

Martin Aenis

Jeffrey C Hudgens

William Tyler Weaver

Alexander Berger

Jacob Newman

Andrew J Constant

Shay Assaf

Christof Klesen

Ulrich Oldendorf

Timo Adler

Christian Wolfgang Ehmann

Thomas Sebald

Britta Späh

Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

Transport system

An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base, and a carrier which is movable relative to the base. The apparatus further includes at least three magnetic bearings, by means of which the carrier is supported on the base in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, wherein at least two of the magnetic bearings are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit, which is fixed to the carrier or to the base.

Apparatus for at least one of holding, positioning and moving an object and method of operating an apparatus for at least one of holding, positioning and moving an object

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Darmstadt, Germany

Martin Aenis