Stichting Imec Nederland

Imec Vzw

Canon Kabushiki Kaisha

Panasonic Corporation

Katholieke Universiteit Leuven

Imec

Martijn Goedbloed

Geert Altena

Marcel Zevenbergen

Dennis Hohlfeld

Yasuyuki Naito

Koray Karakaya

Mercedes Crego Calama

Robert Puers

Igor Shklyarevskiy

Youri De Loore

Takahiro Peter Terayama

Rob Van Schaijk

Sandor Joppen

Christine De Nooijer

Patrick Brandts

Bram Pape

Tom Sterken

Greja Brom-Verheyden

Pawel Bembnowicz

Mihai Patrascu

A droplet jetting device comprising a membrane layer defining a pressure chamber that is in fluid communication with a nozzle, the membrane layer carrying, on a membrane that covers the pressure chamber, an actuator for generating pressure waves in a liquid in the pressure chamber, the device further comprising a distribution layer bonded to the membrane layer on the side of the membrane and defining a supply line for supplying the liquid to the pressure chamber, the supply line being connected to the pressure chamber via a restrictor passage extending through the distribution layer in the thickness direction of that layer, and via a window formed in the membrane, characterized in that the restrictor passage has a uniform cross-section, and the membrane window is delimited by a contour that is inwardly offset from the contour of the restrictor passage on the entire periphery of the restrictor passage.

Droplet jetting device

The present disclosure relates to a sensor and a measuring system and a sensor network that incorporate one or more such sensors. An example sensor could be configured to measure a conductivity of a liquid. The sensor includes a first electrode and a second electrode, each electrode having a surface area, wherein the surface area of the electrodes determines a cell constant of the sensor (Kcell), and wherein at least one of the electrodes is provided with a switching means arranged so that the surface area of the respective electrode can be changed, thereby varying the cell constant (Kcell) of the sensor.

Conductivity sensor

Systems and methods described herein include a reference electrode for being immersed in a bulk solution. The reference electrode comprises a reservoir having reservoir walls defining a reservoir volume filled with an electrolyte; an electrode in the reservoir, in contact with the electrolyte. The reservoir of the reference electrode is closed except for the presence of at least one pore in at least one of the reservoir walls, the at least one pore being filled with electrolyte and being adapted for allowing ionic contact between the electrolyte in the reservoir and the bulk solution into which the reference electrode is to be immersed.

Reference electrode with a pore membrane

Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.

Micro-electromechanical generator and electric apparatus using same

A method for fabricating an out-of-plane variable overlap MEMS capacitor comprises: providing a substrate () comprising a first layer (), a second layer (), and a third layer () stacked on top of one another; and etching a plurality of first trenches () through the third layer (), through the second layer (), and into the first layer () using a single etching mask. Etching the plurality of first trenches () defines a plurality of first fingers () in the third layer () and a plurality of second fingers () in the first layer (). By using a single mask, the process is self-aligned. The method further comprises removing the second layer () in a first region where the plurality of first trenches () are provided, thereby forming a spacing or gap between the plurality of first fingers () and the plurality of second fingers ().

Method for forming MEMS variable capacitors

A microfluidic device is described. The microfluidic device comprises at least one transport channel and at least one working chamber, wherein the at least one transport channel and the at least one working chamber are separated from each other by a common deformable wall. The at least one transport channel is for containing a transport fluid and the at least one working chamber is for containing a working fluid. The microfluidic device comprises at least one pair of electrodes for changing the pressure on the working fluid such that when the pressure on the working fluid is changed, the deformable wall deforms, resulting in a change of the cross-section of the at least one transport channel. The working chamber comprises a flexible wall different from the common deformable wall and at least one electrode of the at least one pair of electrodes is provided on the flexible wall.

Microfluidic-device systems and methods for manufacturing microfluidic-device systems

A microstructure has a substrate, a fixed electrode having a plurality of fixed fingers fixed to the substrate, a movable electrode having a body () and a plurality of fingers () extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes. The fixed fingers () extend in a first plane parallel to a main surface of the substrate, wherein the body of the movable electrode extends in a second plane adjacent to the first plane so that the body faces at least some of the plurality of fixed fingers. Such vertical integration can help enable such devices to be made more compact.

Microstructure with enlarged mass and electrode area for kinetic to electrical energy conversion

Growing community of inventors

Aachen, Germany

Martijn Goedbloed