Centre National De La Recherche Scientifique

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Martial Defoort

Marc Sansa Perna

Eddy Collin

Andrew Armour

The present description concerns a microelectromechanical sensor control method, including the steps of: exciting, with same first signal (FSL), a first resonant (L) and at least one second resonant element (R); and estimating a phase shift (&#x394;&#x3c6;) between the first signal and a second signal (FSR) which is an image of vibrations of the second resonant element.

Sensor control method

An electromechanical amplifying method including a transducing an electrical signal to a mechanical resonator having a mechanical resonance mode with an angular frequency &#x3c9;; transducing the non-linear oscillations of the resonator into a transduced electrical signal; and filtering the transduced electrical signal to obtain an output signal, the signal transduced to the resonator being obtained by adding a first input signal of a first amplitude and a first angular frequency &#x3c9;and a second pump signal of a second amplitude greater than the first amplitude and of a second angular frequency &#x3c9;that is different from the first angular frequency, the first and second angular frequencies being close to the angular frequency &#x3c9;of the mechanical resonator and the second pump signal being chosen from a range of angular frequencies &#x3c9;and amplitudes in which the resonator is actuated in a non-linear regime.

Growing community of inventors

Grenoble, France

Martial Defoort