Atotech Deutschland Gmbh

Marta Sainz-Vila

Josef Gaida

Olaf Kurtz

Jürgen Barthelmes

Robert Rüther

Thomas Moritz

Florence Lagorce-Broc

Oleg Sprenger

A method for electrodepositing a metal layer from an electrolytic bath is described, wherein the concentrations of at least two components of the electrolytic bath are monitored by carrying out the following steps: (a) a sample is taken from the electrolytic bath; (b) the sample is supplied to a column for solid phase extraction, which contains a solid sorbent material; (c) the column is subjected to a washing procedure with a first eluent, wherein the at least two components remain on the column, and undesired components are eluted from the column; (d) the at least two components are eluted from the column by a second eluent; (e) the concentrations of the at least two components in the eluate obtained in step (d) are determined without separating the components from each other. In this method the use of poly(divinyl benzene-co-N-vinyl pyrrolidone) for solid phase extraction is particularly advantageous.

Electrodeposition method with analysis of the electrolytic bath by solid phase extraction

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Berlin, Germany

Marta Sainz-Vila