Entegris, Inc.

Marshall Randolph

Christopher J Vroman

A high pressure filter including first and second housings having complimentary tapered surfaces, a gasket located between the tapered surfaces, a filter element centrally disposed within the housings, and a compression collar fitted over the second housing and threaded onto the first housing is provided. Methods of making and using high pressure filters are also provided.

High pressure filter

An apparatus and method for maintaining low gas velocity variation across a diffuser membrane during the vent-up of a vacuum chamber is disclosed. The diffuser membrane permeability and the pressure conditions across the membrane are chosen to minimize variation in gas flow velocity through the membrane during the vent-up cycle. This reduces re-distribution of particles from a vacuum chamber onto sensitive substrates in the vacuum chamber during vent-up from sub-atmospheric pressure to atmospheric pressure.

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Wellesley, MA, United States of America

Marshall Randolph